Problem svgcoat SNF 2004-09-29 16:27:36: svgcoat: photoresist on hotplate

ynzhao at snf.stanford.edu ynzhao at snf.stanford.edu
Wed Sep 29 16:27:37 PDT 2004


i put the dummy wafer upside down, so the hot plate now has photoresist stain on it. I am Sorry.




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