Shutdown svgcoat SNF 2004-09-30 09:32:34: Under weekly PM

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 30 10:41:21 PDT 2004


weekly Pm Completed, ( cleaned catch cup, spindle tube, belts hmds hotplate, post bake hotplate,  lubricated spindle,cycled
wafers ( cleaned dummy wafers ) , ready to use . :-)   




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