From king at snf.stanford.edu Fri Apr 1 12:26:55 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 1 Apr 2005 12:26:55 -0800 Subject: Comment svgcoat SNF 2005-04-01 12:26:54: PR splatters Message-ID: From king at snf.stanford.edu Fri Apr 1 13:08:54 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 1 Apr 2005 13:08:54 -0800 Subject: Problem svgcoat SNF 2005-04-01 13:08:53: PR splatters, SVGcoat1 Message-ID: From vilanova at snf.stanford.edu Fri Apr 1 13:36:08 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Apr 2005 13:36:08 -0800 Subject: Problem svgcoat SNF 2005-04-01 13:08:53: PR splatters, SVGcoat1 Message-ID: purged line cleaned dispense hose cycled wafers , ok to use. From vilanova at snf.stanford.edu Fri Apr 1 13:36:42 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Apr 2005 13:36:42 -0800 Subject: Comment svgcoat SNF 2005-04-01 12:26:54: PR splatters Message-ID: cleaned dispense hose , purged line , cycled wafers , ok to use. From rubenluo at snf.stanford.edu Sun Apr 3 15:39:36 2005 From: rubenluo at snf.stanford.edu (rubenluo at snf.stanford.edu) Date: Sun, 3 Apr 2005 15:39:36 -0700 Subject: Problem svgcoat SNF 2005-04-03 15:39:35: The spin Message-ID: From vilanova at snf.stanford.edu Mon Apr 4 07:02:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 4 Apr 2005 07:02:10 -0700 Subject: Problem svgcoat SNF 2005-04-03 15:39:35: The spin Message-ID: Cycles a few wafers , I could not find nothing wrong with the system , ok to use. From joshchi at snf.stanford.edu Tue Apr 5 12:19:17 2005 From: joshchi at snf.stanford.edu (joshchi at snf.stanford.edu) Date: Tue, 5 Apr 2005 12:19:17 -0700 Subject: Problem svgcoat SNF 2005-04-05 12:19:16: edge bead removal problem Message-ID: I setup to remove 2mm edge bead, but it still removes 5mm. Two dummy wafers have the same results. From martinez at snf.stanford.edu Tue Apr 5 14:10:42 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 5 Apr 2005 14:10:42 -0700 Subject: Problem svgcoat SNF 2005-04-05 12:19:16: edge bead removal problem Message-ID: user error. incorrect arm program was selected From gyama at snf.stanford.edu Wed Apr 6 07:37:57 2005 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 6 Apr 2005 07:37:57 -0700 Subject: Problem svgcoat SNF 2005-04-06 07:37:56: V prime hot plate 132C, alarming Message-ID: From vilanova at snf.stanford.edu Wed Apr 6 09:20:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Apr 2005 09:20:03 -0700 Subject: Problem svgcoat SNF 2005-04-06 07:37:56: V prime hot plate 132C, alarming Message-ID: Vapor prime setting Adjusted , 125oC , ok to use. From yetao at snf.stanford.edu Tue Apr 12 11:36:31 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Tue, 12 Apr 2005 11:36:31 -0700 Subject: Problem svgcoat SNF 2005-04-12 11:36:30: prime station vacuum error Message-ID: From martinez at snf.stanford.edu Tue Apr 12 13:46:00 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 12 Apr 2005 13:46:00 -0700 Subject: Problem svgcoat SNF 2005-04-12 11:36:30: prime station vacuum error Message-ID: cleaned vp oring, adj vp lid. cycled test wafers From fumin at snf.stanford.edu Mon Apr 18 15:12:35 2005 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Mon, 18 Apr 2005 15:12:35 -0700 Subject: Problem svgcoat SNF 2005-04-18 15:12:35: edge bead removal is not working Message-ID: From martinez at snf.stanford.edu Mon Apr 18 16:01:29 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 18 Apr 2005 16:01:29 -0700 Subject: Problem svgcoat SNF 2005-04-18 15:12:35: edge bead removal is not working Message-ID: adj ebr n2 pressure regulator cycled test wafers From me342a at snf.stanford.edu Sat Apr 23 11:58:05 2005 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Sat, 23 Apr 2005 11:58:05 -0700 Subject: Problem svgcoat SNF 2005-04-23 11:57:59: SPR 3612 dispense problem Message-ID: The 3612 resist was gone so I replaced the bottle. The resist is not feeding properly from the bottle, although the setup seems correct. As a result, the spin is very poor. Use at your own risk! From vilanova at snf.stanford.edu Mon Apr 25 07:49:09 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Apr 2005 07:49:09 -0700 Subject: Problem svgcoat SNF 2005-04-23 11:57:59: SPR 3612 dispense problem Message-ID: Purged Line A couple of times Cleaned nozzle, Cycled wafers Using Programs 7 & 8 ( 3612 Resist ) No problem found, ok to use. From gladys at snf.stanford.edu Mon Apr 25 15:39:16 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mon, 25 Apr 2005 15:39:16 -0700 Subject: Problem svgcoat SNF 2005-04-25 15:39:15: extra drop of pr at the center and ebr dispense Message-ID: is doing in droplets. From vilanova at snf.stanford.edu Tue Apr 26 07:31:11 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Apr 2005 07:31:11 -0700 Subject: Problem svgcoat SNF 2005-04-25 15:39:15: extra drop of pr at the center and ebr dispense Message-ID: someone Deleted the EBR step from the programs, checked and programmed Steps, cycled wafers , ok to use. From vilanova at snf.stanford.edu Tue Apr 26 07:31:43 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Apr 2005 07:31:43 -0700 Subject: Comment svgcoat SNF 2005-03-28 10:02:45: 220-7 Message-ID: Cleared Problem. From me342a at snf.stanford.edu Wed Apr 27 08:23:26 2005 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Wed, 27 Apr 2005 08:23:26 -0700 Subject: Problem svgcoat SNF 2005-04-27 08:23:25: Message-ID: accidentally put wafe in upside down, needs cleaning. sorry From me342a at snf.stanford.edu Wed Apr 27 08:23:51 2005 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Wed, 27 Apr 2005 08:23:51 -0700 Subject: Shutdown svgcoat SNF 2005-04-27 08:23:51: Message-ID: accidentally put wafer in upside down, needs cleaning From vilanova at snf.stanford.edu Wed Apr 27 09:01:57 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Apr 2005 09:01:57 -0700 Subject: Shutdown svgcoat SNF 2005-04-27 08:23:51: Message-ID: From vilanova at snf.stanford.edu Wed Apr 27 09:02:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Apr 2005 09:02:13 -0700 Subject: Problem svgcoat SNF 2005-04-27 08:23:25: Message-ID: From me342c at snf.stanford.edu Wed Apr 27 15:17:40 2005 From: me342c at snf.stanford.edu (me342c at snf.stanford.edu) Date: Wed, 27 Apr 2005 15:17:40 -0700 Subject: Problem svgcoat SNF 2005-04-27 15:17:40: Vapor Prime Track 1 Message-ID: There is photoresist on the surface of vapor prime track 1. From vilanova at snf.stanford.edu Thu Apr 28 07:21:04 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 28 Apr 2005 07:21:04 -0700 Subject: Problem svgcoat SNF 2005-04-27 15:17:40: Vapor Prime Track 1 Message-ID: User ran wafer Upside down , Cleaned Resist from hotplate, cycled wafers , ok to use.