Problem svgcoat SNF 2005-04-23 11:57:59: SPR 3612 dispense problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 25 07:49:09 PDT 2005


Purged Line A couple of times Cleaned nozzle, Cycled wafers
Using Programs 7 & 8 ( 3612 Resist ) No problem  found,
ok to use. 




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