From mahnaz at snf.stanford.edu Mon Aug 1 10:09:18 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 1 Aug 2005 10:09:18 -0700 Subject: Problem svgcoat SNF 2005-08-01 10:09:17: bad spin and EBR back splash Message-ID: I ran 4 dummies ans cleaned the tip with qtips, still see the problem. From martinez at snf.stanford.edu Mon Aug 1 14:16:54 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:16:54 -0700 Subject: Shutdown svgcoat SNF 2005-08-01 14:16:54: weekly p.m. Message-ID: From martinez at snf.stanford.edu Mon Aug 1 14:56:22 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:56:22 -0700 Subject: Problem svgcoat SNF 2005-08-01 10:09:17: bad spin and EBR back splash Message-ID: adj suck back, cleaned nozzles cycled test wafers From martinez at snf.stanford.edu Mon Aug 1 14:56:35 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:56:35 -0700 Subject: Shutdown svgcoat SNF 2005-08-01 14:16:54: weekly p.m. Message-ID: weekly pm done From martinez at snf.stanford.edu Mon Aug 1 14:56:54 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:56:54 -0700 Subject: Problem svgcoat SNF 2005-07-29 18:35:52: Feeder on svgcoat1 does not go down Message-ID: adj cassette present switch From jhpark9 at snf.stanford.edu Mon Aug 1 15:49:46 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 1 Aug 2005 15:49:46 -0700 Subject: Problem svgcoat SNF 2005-08-01 15:49:45: EBR wash step problem Message-ID: EBR is not good. When the liquid comes out to wash EBR, there are lots of air bubbles. From ianw at snf.stanford.edu Tue Aug 2 00:08:39 2005 From: ianw at snf.stanford.edu (ianw at snf.stanford.edu) Date: Tue, 2 Aug 2005 00:08:39 -0700 Subject: Problem svgcoat SNF 2005-08-02 00:08:39: backwash nozzle Message-ID: A small blob of liquid is formed on the back of my wafer near the backwash nozzle... nozzle leaks a little? From martinez at snf.stanford.edu Tue Aug 2 09:59:21 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 2 Aug 2005 09:59:21 -0700 Subject: Problem svgcoat SNF 2005-08-02 00:08:39: backwash nozzle Message-ID: adj ebr flow rate cycled ten wafers 1.0um 3612/4mm ebr no splashback/bubbles From martinez at snf.stanford.edu Tue Aug 2 09:59:52 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 2 Aug 2005 09:59:52 -0700 Subject: Problem svgcoat SNF 2005-08-01 15:49:45: EBR wash step problem Message-ID: adj ebr flow rate. tested good From king at snf.stanford.edu Tue Aug 2 10:41:42 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 2 Aug 2005 10:41:42 -0700 Subject: Problem svgcoat SNF 2005-08-02 10:41:41: receiver cassette problems, ugly PR dispense Message-ID: From martinez at snf.stanford.edu Tue Aug 2 11:15:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 2 Aug 2005 11:15:25 -0700 Subject: Problem svgcoat SNF 2005-08-02 10:41:41: receiver cassette problems, ugly PR dispense Message-ID: purged air from resist line ready for use From martinez at snf.stanford.edu Fri Aug 5 08:45:10 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 5 Aug 2005 08:45:10 -0700 Subject: Shutdown svgcoat SNF 2005-08-05 08:45:09: WPM Message-ID: From martinez at snf.stanford.edu Fri Aug 5 10:35:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 5 Aug 2005 10:35:25 -0700 Subject: Shutdown svgcoat SNF 2005-08-05 08:45:09: WPM Message-ID: wpm done replaced top ebr nozzle adj height & ebr prressure cycled five test wafers. no splashback From harshal at snf.stanford.edu Fri Aug 5 18:30:48 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Fri, 5 Aug 2005 18:30:48 -0700 Subject: Problem svgcoat SNF 2005-08-05 18:30:48: 1.6 um coat not good. Message-ID: got a bad coat oin two successive wafers due to some dispenser problem. check with dummy wafer before using. From vilanova at snf.stanford.edu Mon Aug 8 07:30:50 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Aug 2005 07:30:50 -0700 Subject: Comment svgcoat SNF 2005-07-29 18:35:19: Feeder on svgcoat track 1 Message-ID: Send Indexer working Fine , no problem found , ok to use. From vilanova at snf.stanford.edu Mon Aug 8 07:31:46 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Aug 2005 07:31:46 -0700 Subject: Problem svgcoat SNF 2005-08-05 18:30:48: 1.6 um coat not good. Message-ID: Purged Line , Cleaned Dispense hose, Cycled 6 wafers System working ok , ready to use. From jhpark9 at snf.stanford.edu Mon Aug 8 16:27:23 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 8 Aug 2005 16:27:23 -0700 Subject: Problem svgcoat SNF 2005-08-08 16:27:23: transfer problem Message-ID: there is a transfer problem between last cool plate and index. From martinez at snf.stanford.edu Mon Aug 8 16:37:10 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 8 Aug 2005 16:37:10 -0700 Subject: Problem svgcoat SNF 2005-08-08 16:27:23: transfer problem Message-ID: adj cassette present switch on send indexer cycled wafers. ok to use From sjo at snf.stanford.edu Thu Aug 11 03:35:36 2005 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Thu, 11 Aug 2005 03:35:36 -0700 Subject: Problem svgcoat SNF 2005-08-11 03:35:34: Resist drops onto wafer Message-ID: The resist keeps flowing at a slow rate after the initial dispense when running program 7 (3612 resist). Typically, at least one drop of resist would accumulate and fall onto the wafer, often during the edge bead removal step. Workaround: Catch/remove the drop with a Q-tip before it falls. From vilanova at snf.stanford.edu Thu Aug 11 07:36:11 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Aug 2005 07:36:11 -0700 Subject: Problem svgcoat SNF 2005-08-11 03:35:34: Resist drops onto wafer Message-ID: User Replaced the Resist bottle but forgot to purge line, I purged line and Adjusted Suck Back , Cycled several wafers, ready to use. From crichter at snf.stanford.edu Thu Aug 11 17:18:49 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 11 Aug 2005 17:18:49 -0700 Subject: Problem svgcoat SNF 2005-08-11 17:18:49: 7um resist nozzle not dispensing enough resist Message-ID: I see less photoresist being dispensed on some wafers. Some dummy wafers were run and noticed that the resist was not at the end of the nozzel every time. It was about .5cm gap....possible resist backflow? From vilanova at snf.stanford.edu Fri Aug 12 07:13:26 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Aug 2005 07:13:26 -0700 Subject: Problem svgcoat SNF 2005-08-11 17:18:49: 7um resist nozzle not dispensing enough resist Message-ID: adjusted suckback ,cleaned nozzle, cycled several wafers , ready to use. From martinez at snf.stanford.edu Fri Aug 19 14:03:49 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 19 Aug 2005 14:03:49 -0700 Subject: Shutdown svgcoat SNF 2005-08-19 14:03:49: WPM Message-ID: From martinez at snf.stanford.edu Fri Aug 19 14:52:13 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 19 Aug 2005 14:52:13 -0700 Subject: Shutdown svgcoat SNF 2005-08-19 14:03:49: WPM Message-ID: wpm done From hanjun at snf.stanford.edu Sat Aug 20 16:30:34 2005 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Sat, 20 Aug 2005 16:30:34 -0700 Subject: Problem svgcoat SNF 2005-08-20 16:30:33: sender doesn't start Message-ID: The sender positioner doesn't lower, and thus send a wafer, when START is pressed. From vilanova at snf.stanford.edu Mon Aug 22 07:27:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Aug 2005 07:27:10 -0700 Subject: Problem svgcoat SNF 2005-08-20 16:30:33: sender doesn't start Message-ID: adjusted Indexer ( sender ) sensor, cycled several wafers ok to use. From jhpark9 at snf.stanford.edu Mon Aug 22 17:10:43 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 22 Aug 2005 17:10:43 -0700 Subject: Problem svgcoat SNF 2005-08-22 17:10:43: thickness Message-ID: Every thickness is thicker than the original target thickness(ie.1.0, 1.6 and 7.0um) without recipe change From vilanova at snf.stanford.edu Tue Aug 23 07:32:17 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Aug 2005 07:32:17 -0700 Subject: Problem svgcoat SNF 2005-08-22 17:10:43: thickness Message-ID: checked thickness for All different programs , I could not see a problem with system ok to use. From vilanova at snf.stanford.edu Thu Aug 25 09:27:02 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2005 09:27:02 -0700 Subject: Problem svgcoat SNF 2005-08-25 09:27:01: NO Bottom EBR Message-ID: There's no Bottom Ebr , part has been order. From martinez at snf.stanford.edu Fri Aug 26 09:07:50 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 26 Aug 2005 09:07:50 -0700 Subject: Shutdown svgcoat SNF 2005-08-26 09:07:50: shutdown svgcoat Message-ID: vac error on vapor prime From martinez at snf.stanford.edu Fri Aug 26 09:33:32 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 26 Aug 2005 09:33:32 -0700 Subject: Shutdown svgcoat SNF 2005-08-26 09:07:50: shutdown svgcoat Message-ID: calibrated rail step count cycled 10 test wafers From ericp at snf.stanford.edu Sat Aug 27 13:38:54 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 27 Aug 2005 13:38:54 -0700 Subject: Problem svgcoat SNF 2005-08-27 13:38:54: HMDS is out. Message-ID: From crichter at snf.stanford.edu Sun Aug 28 16:08:55 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 28 Aug 2005 16:08:55 -0700 Subject: Problem svgcoat SNF 2005-08-28 16:08:54: coater chuck dirty Message-ID: I was coating the backside of my wafer and found that the chuck left a ring on the frontside of my wafer. i tried cleaning the wafer with acetone, but the stain/deposit wouldn't come off. From crichter at snf.stanford.edu Sun Aug 28 17:50:46 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 28 Aug 2005 17:50:46 -0700 Subject: Comment svgcoat SNF 2005-08-28 17:50:45: disregard dirty chuck problem Message-ID: i wiped the chuck down with a little acetone applied on a wiper and ran a dummy wafer and had no stains on the backside of my wafer From vilanova at snf.stanford.edu Mon Aug 29 07:41:38 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2005 07:41:38 -0700 Subject: Problem svgcoat SNF 2005-08-27 13:38:54: HMDS is out. Message-ID: refilled HMDS Canister , cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Aug 29 07:42:12 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2005 07:42:12 -0700 Subject: Problem svgcoat SNF 2005-08-28 16:08:54: coater chuck dirty Message-ID: Cleaned chuck and post bake hotplate , ready to use. From vilanova at snf.stanford.edu Mon Aug 29 07:42:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2005 07:42:33 -0700 Subject: Comment svgcoat SNF 2005-08-28 17:50:45: disregard dirty chuck problem Message-ID: Cleaned chuck and post bake hotplate , ok to use. From vilanova at snf.stanford.edu Wed Aug 31 12:32:50 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 Aug 2005 12:32:50 -0700 Subject: Shutdown svgcoat SNF 2005-08-31 12:32:49: Work In progress............ Message-ID: From vilanova at snf.stanford.edu Wed Aug 31 14:04:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 Aug 2005 14:04:10 -0700 Subject: Shutdown svgcoat SNF 2005-08-31 12:32:49: Work In progress............ Message-ID: work completed , replaced broken Ebr nozzle , replaced gaskets and ebr arm , cycled wafers , ok to use. From vilanova at snf.stanford.edu Wed Aug 31 14:04:30 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 31 Aug 2005 14:04:30 -0700 Subject: Problem svgcoat SNF 2005-08-25 09:27:01: NO Bottom EBR Message-ID: read previous message.