From tag at snf.stanford.edu  Sun Dec  4 22:46:30 2005
From: tag at snf.stanford.edu (tag at snf.stanford.edu)
Date: Sun, 4 Dec 2005 22:46:30 -0800
Subject: Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"
Message-ID: <mailman.1114.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

A wafer is stuck on a prime plate.



From vilanova at snf.stanford.edu  Mon Dec  5 07:34:52 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 5 Dec 2005 07:34:52 -0800
Subject: Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"
Message-ID: <mailman.1115.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

User ran a wafer upside down , removed wafer cleaned 
hotplate, cycled wafers, ready to use. 



From mahnaz at snf.stanford.edu  Tue Dec  6 10:15:03 2005
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 6 Dec 2005 10:15:03 -0800
Subject: Problem svgcoat SNF 2005-12-06 10:15:02: EBR splash all the way to the center
Message-ID: <mailman.1116.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

I had clean the nozzel and ran 6 dummies as well.



From martinez at snf.stanford.edu  Tue Dec  6 14:14:13 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Tue, 6 Dec 2005 14:14:13 -0800
Subject: Problem svgcoat SNF 2005-12-06 10:15:02: EBR splash all the way to the center
Message-ID: <mailman.1117.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

cleaned ebr nozzle
adj ebr canister pressure for track 1
cycled 10 wafers. ready for use



From martinez at snf.stanford.edu  Thu Dec  8 09:38:00 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 8 Dec 2005 09:38:00 -0800
Subject: Shutdown svgcoat SNF 2005-12-08 09:37:59: WPM
Message-ID: <mailman.1118.1357938706.25882.svgcoat-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Dec  8 10:14:42 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 8 Dec 2005 10:14:42 -0800
Subject: Shutdown svgcoat SNF 2005-12-08 09:37:59: WPM
Message-ID: <mailman.1119.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

wpm done



From gibby at snf.stanford.edu  Thu Dec  8 17:09:32 2005
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Thu, 8 Dec 2005 17:09:32 -0800
Subject: Problem svgcoat SNF 2005-12-08 17:09:31: Chuck malfunction
Message-ID: <mailman.1120.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

The vacuum is working on the chuck, but the chuck will not drop into the coater....the whole system just sits there.



From bchui at snf.stanford.edu  Thu Dec  8 21:26:09 2005
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Thu, 8 Dec 2005 21:26:09 -0800
Subject: Comment svgcoat SNF 2005-12-08 21:26:08: Worked fine for me...no chuck problems
Message-ID: <mailman.1121.1357938706.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Dec  9 07:14:03 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 9 Dec 2005 07:14:03 -0800
Subject: Problem svgcoat SNF 2005-12-08 17:09:31: Chuck malfunction
Message-ID: <mailman.1122.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

no problem found , cycled wafers ok to use. 



From vilanova at snf.stanford.edu  Fri Dec  9 07:14:29 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 9 Dec 2005 07:14:29 -0800
Subject: Comment svgcoat SNF 2005-12-08 21:26:08: Worked fine for me...no chuck problems
Message-ID: <mailman.1123.1357938706.25882.svgcoat-pcs@snf.stanford.edu>

no chuck problem , cycled wafers , ok to use.