Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"
tag at snf.stanford.edu
tag at snf.stanford.edu
Sun Dec 4 22:46:30 PST 2005
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Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"
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A wafer is stuck on a prime plate.
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Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"
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