Shutdown svgcoat SNF 2005-12-04 22:46:29: wafer is stuck in "VAPOR PRIME TRACK1"

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Dec 5 07:34:52 PST 2005

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User ran a wafer upside down , removed wafer cleaned 
hotplate, cycled wafers, ready to use.

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