Problem svgcoat SNF 2005-12-06 10:15:02: EBR splash all the way to the center

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Dec 6 14:14:13 PST 2005

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cleaned ebr nozzle
adj ebr canister pressure for track 1
cycled 10 wafers. ready for use

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