From dwburns at snf.stanford.edu Tue Feb 8 02:18:19 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Tue, 8 Feb 2005 02:18:19 -0800 Subject: Problem svgcoat SNF 2005-02-08 02:18:18: Bake station has broken belt Message-ID: From vilanova at snf.stanford.edu Tue Feb 8 07:38:02 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Feb 2005 07:38:02 -0800 Subject: Comment svgcoat SNF 2005-01-22 17:15:22: motor still noisy Message-ID: comment cleared. From vilanova at snf.stanford.edu Tue Feb 8 07:38:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Feb 2005 07:38:19 -0800 Subject: Problem svgcoat SNF 2005-02-08 02:18:18: Bake station has broken belt Message-ID: Replaced Broken Belt, ok to use. From yetao at snf.stanford.edu Sat Feb 12 14:42:07 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Sat, 12 Feb 2005 14:42:07 -0800 Subject: Shutdown svgcoat SNF 2005-02-12 14:42:07: coater doesn't spin Message-ID: From vilanova at snf.stanford.edu Mon Feb 14 08:14:52 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Feb 2005 08:14:52 -0800 Subject: Shutdown svgcoat SNF 2005-02-12 14:42:07: coater doesn't spin Message-ID: coater is working fine , I cycled a few wafers using different programs, and system is working fine, ok to use. From dwburns at snf.stanford.edu Sun Feb 20 21:43:23 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 20 Feb 2005 21:43:23 -0800 Subject: Problem svgcoat SNF 2005-02-20 21:43:23: SPR-220 7.0 bottle went empty and replaced Message-ID: No alarm sounded for low dispense 2 on track 1. From dwburns at snf.stanford.edu Sun Feb 20 21:44:38 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 20 Feb 2005 21:44:38 -0800 Subject: Problem svgcoat SNF 2005-02-20 21:44:37: Spin motor has stopped functioning Message-ID: Bearings on coater motor were making loud noises earlier. From vilanova at snf.stanford.edu Tue Feb 22 08:30:15 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 08:30:15 -0800 Subject: Problem svgcoat SNF 2005-02-20 21:43:23: SPR-220 7.0 bottle went empty and replaced Message-ID: adjusted resist bottle sensor, ok to use. From vilanova at snf.stanford.edu Tue Feb 22 08:33:50 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 08:33:50 -0800 Subject: Problem svgcoat SNF 2005-02-20 21:44:37: Spin motor has stopped functioning Message-ID: when people use a lot of resist ( other than normal ) for manual dispense, the resist goes into the bearing, this makes the spindle not to work properly and / or while spinning makes a lot of noise , please be careful while using manual mode, I 've cleaned up everything, motor spindle working fine, cycled wafers , ok to use. From axiu at snf.stanford.edu Tue Feb 22 09:37:10 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Tue, 22 Feb 2005 09:37:10 -0800 Subject: Problem svgcoat SNF 2005-02-22 09:37:09: wafer does not move at hot plate Message-ID: From vilanova at snf.stanford.edu Tue Feb 22 09:48:01 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Feb 2005 09:48:01 -0800 Subject: Problem svgcoat SNF 2005-02-22 09:37:09: wafer does not move at hot plate Message-ID: I just checked system and hotplate is working fine no problem found, ok to use. From kevhuang at snf.stanford.edu Thu Feb 24 13:15:26 2005 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Thu, 24 Feb 2005 13:15:26 -0800 Subject: Problem svgcoat SNF 2005-02-24 13:15:26: sometimes machine won't run for no apparent reason Message-ID: From vilanova at snf.stanford.edu Thu Feb 24 13:43:15 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Feb 2005 13:43:15 -0800 Subject: Problem svgcoat SNF 2005-02-24 13:15:26: sometimes machine won't run for no apparent reason Message-ID: Operator Error , I Cycled several wafers under 3 different programs , system working Fine , no problem found, ok to use. From lindaw at snf.stanford.edu Sat Feb 26 16:23:07 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 26 Feb 2005 16:23:07 -0800 Subject: Problem svgcoat SNF 2005-02-26 16:23:06: dispenser 2 timing slow Message-ID: The dispense for the 220-7 resist is slow to start. The arm is about half way to the center of the wafer before resist comes out, and then, when it tracks back out, there is a concentric area that has no resist on it prior to spin. If there are etched features in those areas, the resist may have voids around those features. From vilanova at snf.stanford.edu Mon Feb 28 08:35:52 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Feb 2005 08:35:52 -0800 Subject: Problem svgcoat SNF 2005-02-26 16:23:06: dispenser 2 timing slow Message-ID: adjusted resist Pump flow, entered correct arm position settings, cycled wafers ok to use.