Problem svgcoat SNF 2005-02-20 21:44:37: Spin motor has stopped functioning
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Tue Feb 22 08:33:50 PST 2005
when people use a lot of resist ( other than normal ) for manual dispense, the resist goes into the bearing, this makes the
spindle not to work properly and / or while spinning makes a
lot of noise , please be careful while using manual mode,
I 've cleaned up everything, motor spindle working fine, cycled
wafers , ok to use.
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