Problem svgcoat SNF 2005-02-20 21:44:37: Spin motor has stopped functioning

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 22 08:33:50 PST 2005


when people use a lot of resist ( other than normal ) for manual dispense, the resist goes into the bearing, this makes the
spindle not  to work properly and / or while spinning makes a 
lot of noise , please be careful while using manual mode,
I 've cleaned up everything, motor spindle working fine, cycled 
wafers , ok to use. 




More information about the svgcoat-pcs mailing list