Problem svgcoat SNF 2005-02-24 13:15:26: sometimes machine won't run for no apparent reason

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Feb 24 13:43:15 PST 2005


Operator Error , I Cycled several wafers under 3 different
programs , system working Fine , no problem found,
ok to use. 




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