Problem svgcoat SNF 2005-02-26 16:23:06: dispenser 2 timing slow

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Feb 26 16:23:07 PST 2005


The dispense for the 220-7 resist is slow to start.  The arm is about half way to the center of the wafer before resist comes out, and then, when it tracks back out, there is a concentric area that has no resist on it prior to spin. If there are etched features in those areas, the resist may have voids around those features.




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