From khanh at snf.stanford.edu Mon Jan 3 16:44:37 2005 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mon, 3 Jan 2005 16:44:37 -0800 Subject: Problem svgcoat SNF 2005-01-03 16:44:36: Non-uniform photoresist Message-ID: From mahnaz at snf.stanford.edu Mon Jan 3 17:11:53 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 3 Jan 2005 17:11:53 -0800 Subject: Problem svgcoat SNF 2005-01-03 17:11:53: suck back can be improved. Message-ID: I see bad uniformity in the center of the wafers, every so often. From vilanova at snf.stanford.edu Tue Jan 4 09:58:26 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Jan 2005 09:58:26 -0800 Subject: Problem svgcoat SNF 2005-01-03 16:44:36: Non-uniform photoresist Message-ID: Purged line with acetone , replaced resist bottle, cycled 6 wafers, Good Uniformity , ok to use . From vilanova at snf.stanford.edu Tue Jan 4 09:59:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Jan 2005 09:59:13 -0800 Subject: Problem svgcoat SNF 2005-01-03 17:11:53: suck back can be improved. Message-ID: Purged line with acetone , replaced resist bottle, cycled wafers Good Uniformity , Ok to use. From ahuang06 at snf.stanford.edu Sat Jan 8 16:49:02 2005 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Sat, 8 Jan 2005 16:49:02 -0800 Subject: Problem svgcoat SNF 2005-01-08 16:49:01: Temperature out of Range Message-ID: The first oven on SVGCoat Track 1 keeps reporting an out of temperature range problem, the temperature is 129 degrees Celsius right now, but the cool light doesn't come on. From vilanova at snf.stanford.edu Tue Jan 11 09:50:23 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Jan 2005 09:50:23 -0800 Subject: Problem svgcoat SNF 2005-01-08 16:49:01: Temperature out of Range Message-ID: calibrated temp controller, temperature setting back to 125oc Please do not change any settings, ok to use. From ahuang06 at snf.stanford.edu Sun Jan 16 15:23:20 2005 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Sun, 16 Jan 2005 15:23:20 -0800 Subject: Comment svgcoat SNF 2005-01-16 15:23:19: Motor Message-ID: The motor sounds very off From vilanova at snf.stanford.edu Tue Jan 18 07:52:53 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Jan 2005 07:52:53 -0800 Subject: Comment svgcoat SNF 2005-01-16 15:23:19: Motor Message-ID: The Spinner motor sounds Good no problem with it, sounds normal nice and smooth, Ok to use. From axiu at snf.stanford.edu Fri Jan 21 20:23:23 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Fri, 21 Jan 2005 20:23:23 -0800 Subject: Problem svgcoat SNF 2005-01-21 20:23:19: utility alarm alarmed for a while then stoped itself Message-ID: From ahuang06 at snf.stanford.edu Sat Jan 22 10:33:25 2005 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Sat, 22 Jan 2005 10:33:25 -0800 Subject: Problem svgcoat SNF 2005-01-22 10:33:24: EBR Message-ID: the 2mm EBR doesn't seem to be working, checked settings, wafers have no removal on edge From ahuang06 at snf.stanford.edu Sat Jan 22 10:48:34 2005 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Sat, 22 Jan 2005 10:48:34 -0800 Subject: Comment svgcoat SNF 2005-01-22 10:48:33: EBR (cont) Message-ID: EBR with arm 6 (2mm) doesn't show up. with arm 7, (5mm) a ~2mm ebr ring shows up From aokyay at snf.stanford.edu Sat Jan 22 17:15:23 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 22 Jan 2005 17:15:23 -0800 Subject: Comment svgcoat SNF 2005-01-22 17:15:22: motor still noisy Message-ID: From vilanova at snf.stanford.edu Mon Jan 24 08:10:07 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Jan 2005 08:10:07 -0800 Subject: Problem svgcoat SNF 2005-01-21 20:23:19: utility alarm alarmed for a while then stoped itself Message-ID: Utility alarm sounded because the resist bottle was empty replaced resist bottle , ok to use. From vilanova at snf.stanford.edu Mon Jan 24 08:11:07 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Jan 2005 08:11:07 -0800 Subject: Problem svgcoat SNF 2005-01-22 10:33:24: EBR Message-ID: Found EBR arm out of position, adjusted arm position , tested cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Jan 24 08:11:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Jan 2005 08:11:33 -0800 Subject: Comment svgcoat SNF 2005-01-22 10:48:33: EBR (cont) Message-ID: Adjusted EBR arm position . From ratiug at snf.stanford.edu Wed Jan 26 13:02:15 2005 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Wed, 26 Jan 2005 13:02:15 -0800 Subject: Problem svgcoat SNF 2005-01-26 13:02:14: wafer broken when coating Message-ID: I picked up several pieces. Bu there are still many small pieces beneath coater. From vilanova at snf.stanford.edu Wed Jan 26 13:18:24 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jan 2005 13:18:24 -0800 Subject: Problem svgcoat SNF 2005-01-26 13:02:14: wafer broken when coating Message-ID: removed broken pieces, ok to use now . :-)