Problem svgcoat SNF 2005-01-03 16:44:36: Non-uniform photoresist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jan 4 09:58:26 PST 2005

Previous message: Problem svgcoat SNF 2005-01-03 16:44:36: Non-uniform photoresist
Next message: Problem svgcoat SNF 2005-01-03 17:11:53: suck back can be improved.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Purged line with acetone , replaced resist bottle, cycled 6
wafers,  Good Uniformity , ok to use .

Previous message: Problem svgcoat SNF 2005-01-03 16:44:36: Non-uniform photoresist
Next message: Problem svgcoat SNF 2005-01-03 17:11:53: suck back can be improved.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat-pcs mailing list