Problem svgcoat SNF 2005-07-01 17:14:03: a wafer got stucked under the primer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 5 08:33:34 PDT 2005


User   removed the  wafer from hotplate  forced the
rail and hotplate cover ,  broke the rail 
motor  , now users have to use YEs oven for HMDS Step and 
Use program 9 on system to bypass HMDS step.  




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