Problem svgcoat SNF 2005-07-01 17:14:03: a wafer got stucked under the primer

[vilanova at snf.stanford.edu]

User   removed the  wafer from hotplate  forced the
rail and hotplate cover ,  broke the rail 
motor  , now users have to use YEs oven for HMDS Step and 
Use program 9 on system to bypass HMDS step.