Problem svgcoat SNF 2005-07-13 16:51:53: First Cool Plate Not Sensing Wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 14 07:22:44 PDT 2005


Cool Station didtn want to work because a user ran a dummy  wafer upside down,  Cleaned Excesive Amount of resist from Hotplate, Cycled wafers , ok to use. 




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