Problem svgcoat SNF 2005-07-21 15:17:12: spots on the coated wafer

jhpark9 at snf.stanford.edu jhpark9 at snf.stanford.edu
Thu Jul 21 15:17:13 PDT 2005


In the front track, there are lots of spots after coating 1 and 1.6um. When compared with the back track, it is so bad.




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