Problem svgcoat SNF 2005-07-21 15:48:20: spots found on resist (?)
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Thu Jul 21 16:26:03 PDT 2005
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Problem svgcoat SNF 2005-07-21 15:48:20: spots found on resist (?)
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Shutdown svgcoat SNF 2005-07-22 08:47:04: spindle replacement
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adj ebr pressure, cycled test wafers
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Problem svgcoat SNF 2005-07-21 15:48:20: spots found on resist (?)
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Shutdown svgcoat SNF 2005-07-22 08:47:04: spindle replacement
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