Shutdown svgcoat SNF 2005-07-25 10:14:26: ran wafers WITHOUT EBR

martinez at snf.stanford.edu martinez at snf.stanford.edu
Mon Jul 25 13:38:57 PDT 2005

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puged 3612 line with acetone
adj suck back, replaced ebr nozzle
cleaned exhaust tube, cycled wafers

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