Problem svgcoat SNF 2005-07-28 13:34:11: dispense 1 (3612) drips on wafer during spin

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 28 14:09:51 PDT 2005


adjusted resist (3612) suck back , cycled wafers ok to use. 




More information about the svgcoat-pcs mailing list