July 2005 Archives by thread

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Starting: Fri Jul 1 05:57:08 PDT 2005
Ending: Fri Jul 29 18:35:53 PDT 2005
Messages: 65

Problem svgcoat SNF 2005-07-01 05:57:08: Problem vipin at snf.stanford.edu
- Problem svgcoat SNF 2005-07-01 05:57:08: Problem vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-06-30 16:57:41: SVGCoat1 not working well vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-01 11:17:54: HMDS station is not working uli at snf.stanford.edu
- Problem svgcoat SNF 2005-07-01 11:17:54: HMDS station is not working vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-01 17:14:03: a wafer got stucked under the primer barlian at snf.stanford.edu
- Problem svgcoat SNF 2005-07-01 17:14:03: a wafer got stucked under the primer vilanova at snf.stanford.edu
Comment svgcoat SNF 2005-07-03 13:50:23: don't see a wafer anywhere near the vapor lindaw at snf.stanford.edu
- Comment svgcoat SNF 2005-07-03 13:50:23: don't see a wafer anywhere near the vapor vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-04 16:46:56: wafers not leaving send cassette ginel at snf.stanford.edu
- Problem svgcoat SNF 2005-07-04 16:46:56: wafers not leaving send cassette vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-05 08:36:20: DO not use HMDS Step . vilanova at snf.stanford.edu
- Problem svgcoat SNF 2005-07-05 08:36:20: DO not use HMDS Step . vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-05 16:07:06: wafer transfer still not working correctly ginel at snf.stanford.edu
- Problem svgcoat SNF 2005-07-05 16:07:06: wafer transfer still not working correctly vilanova at snf.stanford.edu
Shutdown svgcoat SNF 2005-07-06 09:31:29: Maintenance work in progress... vilanova at snf.stanford.edu
- Shutdown svgcoat SNF 2005-07-06 09:31:29: Maintenance work in progress... vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-08 12:47:40: thick resist dispense unit alarming during disp. lindaw at snf.stanford.edu
- Problem svgcoat SNF 2005-07-08 12:47:40: thick resist dispense unit alarming during disp. vilanova at snf.stanford.edu
Shutdown svgcoat SNF 2005-07-11 08:51:29: WPM martinez at snf.stanford.edu
- Shutdown svgcoat SNF 2005-07-11 08:51:29: WPM martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-11 17:19:41: transfer problem jhpark9 at snf.stanford.edu
- Problem svgcoat SNF 2005-07-11 17:19:41: transfer problem martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-13 16:51:53: First Cool Plate Not Sensing Wafers crichter at snf.stanford.edu
- Problem svgcoat SNF 2005-07-13 16:51:53: First Cool Plate Not Sensing Wafers vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-15 00:44:40: Primer chuck has resist on it bchui at snf.stanford.edu
- Problem svgcoat SNF 2005-07-15 00:44:40: Primer chuck has resist on it vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-15 11:58:20: prime iwjung at snf.stanford.edu
- Problem svgcoat SNF 2005-07-15 11:58:20: prime vilanova at snf.stanford.edu
Comment svgcoat SNF 2005-07-15 14:52:02: Bad Vacuum Switch vilanova at snf.stanford.edu
- Comment svgcoat SNF 2005-07-15 14:52:02: Bad Vacuum Switch vilanova at snf.stanford.edu
Comment svgcoat SNF 2005-07-16 00:12:00: Beep cannot be cleared bohuang at snf.stanford.edu
- Comment svgcoat SNF 2005-07-16 00:12:00: Beep cannot be cleared vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-17 15:10:52: 3612 line dripping resist cmfaulkn at snf.stanford.edu
- Problem svgcoat SNF 2005-07-17 15:10:52: 3612 line dripping resist vilanova at snf.stanford.edu
Comment svgcoat SNF 2005-07-18 11:03:23: Wrong Resist Bottle vilanova at snf.stanford.edu
- Comment svgcoat SNF 2005-07-18 11:03:23: Wrong Resist Bottle vilanova at snf.stanford.edu
Shutdown svgcoat SNF 2005-07-18 12:36:02: Work in progress............ vilanova at snf.stanford.edu
- Shutdown svgcoat SNF 2005-07-18 12:36:02: Work in progress............ vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-19 11:40:24: send indexer does not work iwjung at snf.stanford.edu
- Problem svgcoat SNF 2005-07-19 11:40:24: send indexer does not work vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-20 14:52:42: 3612 dripping onto wafer after spin cmfaulkn at snf.stanford.edu
- Problem svgcoat SNF 2005-07-20 14:52:42: 3612 dripping onto wafer after spin martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-21 15:17:12: spots on the coated wafer jhpark9 at snf.stanford.edu
- Problem svgcoat SNF 2005-07-21 15:17:12: spots on the coated wafer martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-21 15:48:20: spots found on resist (?) crichter at snf.stanford.edu
- Problem svgcoat SNF 2005-07-21 15:48:20: spots found on resist (?) martinez at snf.stanford.edu
Shutdown svgcoat SNF 2005-07-22 08:47:04: spindle replacement martinez at snf.stanford.edu
- Shutdown svgcoat SNF 2005-07-22 08:47:04: spindle replacement martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-22 18:15:30: EBR spraying into the wafers again crichter at snf.stanford.edu
- Problem svgcoat SNF 2005-07-22 18:15:30: EBR spraying into the wafers again martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-25 09:53:50: EBR is out mahnaz at snf.stanford.edu
- Problem svgcoat SNF 2005-07-25 09:53:50: EBR is out martinez at snf.stanford.edu
Shutdown svgcoat SNF 2005-07-25 10:14:26: ran wafers WITHOUT EBR mahnaz at snf.stanford.edu
- Shutdown svgcoat SNF 2005-07-25 10:14:26: ran wafers WITHOUT EBR martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-26 03:55:34: feeding cassette stuck in lowered position me342d at snf.stanford.edu
- Problem svgcoat SNF 2005-07-26 03:55:34: feeding cassette stuck in lowered position vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-27 11:08:52: extra resist drop uli at snf.stanford.edu
- Problem svgcoat SNF 2005-07-27 11:08:52: extra resist drop martinez at snf.stanford.edu
Problem svgcoat SNF 2005-07-28 11:09:34: resist on hmds hotplate mperez at snf.stanford.edu
- Problem svgcoat SNF 2005-07-28 11:09:34: resist on hmds hotplate vilanova at snf.stanford.edu
Problem svgcoat SNF 2005-07-28 13:34:11: dispense 1 (3612) drips on wafer during spin lindaw at snf.stanford.edu
- Problem svgcoat SNF 2005-07-28 13:34:11: dispense 1 (3612) drips on wafer during spin vilanova at snf.stanford.edu
Comment svgcoat SNF 2005-07-29 18:35:19: Feeder on svgcoat track 1 me342d at snf.stanford.edu
Problem svgcoat SNF 2005-07-29 18:35:52: Feeder on svgcoat1 does not go down me342d at snf.stanford.edu

Last message date: Fri Jul 29 18:35:53 PDT 2005
Archived on: Fri Jan 11 13:12:11 PST 2013

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