From sourav at snf.stanford.edu Tue Jun 7 12:07:04 2005 From: sourav at snf.stanford.edu (sourav at snf.stanford.edu) Date: Tue, 7 Jun 2005 12:07:04 -0700 Subject: Problem svgcoat SNF 2005-06-07 12:07:03: Problem with Priming Message-ID: Priming hot plate not working properly From martinez at snf.stanford.edu Tue Jun 7 12:12:00 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 7 Jun 2005 12:12:00 -0700 Subject: Problem svgcoat SNF 2005-06-07 12:07:03: Problem with Priming Message-ID: dummy wafer cycled upside down, stuck to HP removed wafer, cleaned hot plate, cycled test wafer From king at snf.stanford.edu Tue Jun 7 17:50:20 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 7 Jun 2005 17:50:20 -0700 Subject: Comment svgcoat SNF 2005-06-07 17:50:20: track 1 PR is getting low... Message-ID: From vilanova at snf.stanford.edu Wed Jun 8 06:56:27 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Jun 2005 06:56:27 -0700 Subject: Comment svgcoat SNF 2005-06-07 17:50:20: track 1 PR is getting low... Message-ID: bottle has been replaced. From xiangli at snf.stanford.edu Wed Jun 8 15:48:07 2005 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Wed, 8 Jun 2005 15:48:07 -0700 Subject: Problem svgcoat SNF 2005-06-08 15:48:06: Message-ID: High temperature on prime. There is confusion between the sensor and the track. From vilanova at snf.stanford.edu Thu Jun 9 07:08:14 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Jun 2005 07:08:14 -0700 Subject: Problem svgcoat SNF 2005-06-08 15:48:06: Message-ID: From eata at snf.stanford.edu Thu Jun 9 17:07:34 2005 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Thu, 9 Jun 2005 17:07:34 -0700 Subject: Problem svgcoat SNF 2005-06-09 17:07:34: EBR problem Message-ID: EBR flow is slow, does not remove edge bead properly From vilanova at snf.stanford.edu Fri Jun 10 07:06:50 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Jun 2005 07:06:50 -0700 Subject: Problem svgcoat SNF 2005-06-09 17:07:34: EBR problem Message-ID: Adjusted EBR Dispense , cycled wafers , ok to use. From rwoo at snf.stanford.edu Sat Jun 11 02:56:06 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 11 Jun 2005 02:56:06 -0700 Subject: Problem svgcoat SNF 2005-06-11 02:56:05: EBR pressure low Message-ID: The EBR wash comes out as a drizzle and does not properly remove the edge. From rwoo at snf.stanford.edu Sat Jun 11 16:58:23 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 11 Jun 2005 16:58:23 -0700 Subject: Comment svgcoat SNF 2005-06-11 16:58:22: Mario fixed the EBR problem Message-ID: From vilanova at snf.stanford.edu Sat Jun 11 18:33:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 11 Jun 2005 18:33:33 -0700 Subject: Problem svgcoat SNF 2005-06-11 02:56:05: EBR pressure low Message-ID: Adjusted EBR Pressure,Cycled wafers ok to use. From vilanova at snf.stanford.edu Sat Jun 11 18:34:11 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 11 Jun 2005 18:34:11 -0700 Subject: Comment svgcoat SNF 2005-06-11 16:58:22: Mario fixed the EBR problem Message-ID: Fixed EBR Problem I also helped User with a YES OVEN problem , ok to use now . From uli at snf.stanford.edu Fri Jun 17 11:39:58 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 17 Jun 2005 11:39:58 -0700 Subject: Shutdown svgcoat SNF 2005-06-17 11:39:57: HMDS station not working Message-ID: wafer sits inside of HMDS station From martinez at snf.stanford.edu Fri Jun 17 13:27:26 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 17 Jun 2005 13:27:26 -0700 Subject: Shutdown svgcoat SNF 2005-06-17 11:39:57: HMDS station not working Message-ID: adj vp hot plate vac sensor, calibrated hp cycled 10 test wafers From pnataraj at snf.stanford.edu Tue Jun 21 14:31:04 2005 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 21 Jun 2005 14:31:04 -0700 Subject: Problem svgcoat SNF 2005-06-21 14:31:03: skips HMDS on prog 1 Message-ID: From vilanova at snf.stanford.edu Tue Jun 21 14:51:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Jun 2005 14:51:13 -0700 Subject: Problem svgcoat SNF 2005-06-21 14:31:03: skips HMDS on prog 1 Message-ID: cleaned old resist from hmds hotplate , lubricated vacuum seal ,cycled wafers , ready to use. From vilanova at snf.stanford.edu Thu Jun 23 12:50:17 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2005 12:50:17 -0700 Subject: Shutdown svgcoat SNF 2005-06-23 12:50:17: HMDS COntroller work in progress........ Message-ID: From martinez at snf.stanford.edu Thu Jun 23 17:45:57 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 23 Jun 2005 17:45:57 -0700 Subject: Shutdown svgcoat SNF 2005-06-23 12:50:17: HMDS COntroller work in progress........ Message-ID: vp hot plate temp controller & tc replaced track is available for use f/s will return tomorrow 8:00am to fine tune controller From oday at snf.stanford.edu Thu Jun 23 19:13:23 2005 From: oday at snf.stanford.edu (oday at snf.stanford.edu) Date: Thu, 23 Jun 2005 19:13:23 -0700 Subject: Problem svgcoat SNF 2005-06-23 19:13:22: broke wafer Message-ID: wafer broke when hot plate rail came down on top of the wafer. From vilanova at snf.stanford.edu Fri Jun 24 07:08:40 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Jun 2005 07:08:40 -0700 Subject: Problem svgcoat SNF 2005-06-23 19:13:22: broke wafer Message-ID: adjusted wafer transfer rail, cycled wafers ok to use. From martinez at snf.stanford.edu Fri Jun 24 10:56:33 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 24 Jun 2005 10:56:33 -0700 Subject: Shutdown svgcoat SNF 2005-06-24 10:56:32: shutdown svgcoat Message-ID: both coat tracks shutdown for 2 hours for parts replacement From martinez at snf.stanford.edu Fri Jun 24 14:35:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 24 Jun 2005 14:35:25 -0700 Subject: Shutdown svgcoat SNF 2005-06-24 10:56:32: shutdown svgcoat Message-ID: all adjustments and repairs completed cycled 25 test wafers. ready for use From vipin at snf.stanford.edu Sun Jun 26 01:57:52 2005 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Sun, 26 Jun 2005 01:57:52 -0700 Subject: Problem svgcoat SNF 2005-06-26 01:57:51: EBR and resist drips from the nozzle after the spin Message-ID: From ginel at snf.stanford.edu Sun Jun 26 09:24:46 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Sun, 26 Jun 2005 09:24:46 -0700 Subject: Problem svgcoat SNF 2005-06-26 09:24:45: hot plate off Message-ID: From vilanova at snf.stanford.edu Mon Jun 27 07:18:48 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Jun 2005 07:18:48 -0700 Subject: Problem svgcoat SNF 2005-06-26 01:57:51: EBR and resist drips from the nozzle after the spin Message-ID: EBR NOzzle Working Properly , I couldnt repeat the problem , ok to use. From vilanova at snf.stanford.edu Mon Jun 27 07:19:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Jun 2005 07:19:10 -0700 Subject: Problem svgcoat SNF 2005-06-26 09:24:45: hot plate off Message-ID: Hot plate turned Back on , cycled wafers , ready to use. From crichter at snf.stanford.edu Mon Jun 27 15:38:38 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 27 Jun 2005 15:38:38 -0700 Subject: Problem svgcoat SNF 2005-06-27 15:38:37: Program 8 Message-ID: wafers not centered, 5mm EBR off From martinez at snf.stanford.edu Mon Jun 27 16:02:02 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 27 Jun 2005 16:02:02 -0700 Subject: Problem svgcoat SNF 2005-06-27 15:38:37: Program 8 Message-ID: adj ebr nozzle position, cycled wafers From crichter at snf.stanford.edu Tue Jun 28 11:20:55 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 28 Jun 2005 11:20:55 -0700 Subject: Problem svgcoat SNF 2005-06-28 11:20:55: Alarm on Pump Controller Message-ID: Alarm goes off while using the SPR220-7 resist From vilanova at snf.stanford.edu Tue Jun 28 14:20:23 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Jun 2005 14:20:23 -0700 Subject: Problem svgcoat SNF 2005-06-28 11:20:55: Alarm on Pump Controller Message-ID: pump Controller and dispense working fine , Need to reset the Alarm controller for pump # 2 From gladys at snf.stanford.edu Wed Jun 29 18:38:17 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 29 Jun 2005 18:38:17 -0700 Subject: Problem svgcoat SNF 2005-06-29 18:38:17: Primer not working properly Message-ID: It would do on one, then it won't on the next one. From gladys at snf.stanford.edu Wed Jun 29 18:39:15 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 29 Jun 2005 18:39:15 -0700 Subject: Problem svgcoat SNF 2005-06-29 18:39:15: Primer not working consistently Message-ID: From vilanova at snf.stanford.edu Thu Jun 30 07:13:31 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Jun 2005 07:13:31 -0700 Subject: Problem svgcoat SNF 2005-06-29 18:38:17: Primer not working properly Message-ID: Cycled Several Wafers and I could not repeat the problem, Prime station Working Fine , ready to use. From vilanova at snf.stanford.edu Thu Jun 30 07:14:04 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Jun 2005 07:14:04 -0700 Subject: Problem svgcoat SNF 2005-06-29 18:39:15: Primer not working consistently Message-ID: Cycled several wafers , Prime Station Working Fine, Ready to use. From yue at snf.stanford.edu Thu Jun 30 15:46:41 2005 From: yue at snf.stanford.edu (yue at snf.stanford.edu) Date: Thu, 30 Jun 2005 15:46:41 -0700 Subject: Problem svgcoat SNF 2005-06-30 15:46:41: problem Message-ID: HMDS not consistent Alarm : Vacuum break start? From martinez at snf.stanford.edu Thu Jun 30 16:34:44 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 30 Jun 2005 16:34:44 -0700 Subject: Problem svgcoat SNF 2005-06-30 15:46:41: problem Message-ID: cleaned excess vacuum grease from vp lid oring and bowl. cycled 4 wafers, program #1 ready for use From me342d at snf.stanford.edu Thu Jun 30 16:57:42 2005 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Thu, 30 Jun 2005 16:57:42 -0700 Subject: Problem svgcoat SNF 2005-06-30 16:57:41: SVGCoat1 not working well Message-ID: Wafers dont's transfer