From rmelamud at snf.stanford.edu Tue Mar 1 00:51:11 2005 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Tue, 1 Mar 2005 00:51:11 -0800 Subject: Problem svgcoat SNF 2005-03-01 00:51:10: Wafer Lowering Rails on Oven are Jamming Message-ID: When the wafer gets to the oven, the rails that lower the wafer onto the hot plate are jamming. Wafer doesn't get to the hot plate. From vilanova at snf.stanford.edu Tue Mar 1 08:02:49 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Mar 2005 08:02:49 -0800 Subject: Problem svgcoat SNF 2005-03-01 00:51:10: Wafer Lowering Rails on Oven are Jamming Message-ID: HOtplate found Under END Instead of BAKE , Changed Program From End TO bake, cycled wafers ok to use. ( Check your programs Events before you run your wafers) From giulia at snf.stanford.edu Sun Mar 6 09:53:47 2005 From: giulia at snf.stanford.edu (giulia at snf.stanford.edu) Date: Sun, 6 Mar 2005 09:53:47 -0800 Subject: Problem svgcoat SNF 2005-03-06 09:53:47: program 7 coating not uniform Message-ID: coating is not uniform in the center of the waffer From vilanova at snf.stanford.edu Mon Mar 7 10:37:08 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Mar 2005 10:37:08 -0800 Subject: Problem svgcoat SNF 2005-03-06 09:53:47: program 7 coating not uniform Message-ID: adjusted EBR Flow, adjusted EBR Arm , Cycled wafers. ok to use. From fumin at snf.stanford.edu Mon Mar 7 19:21:06 2005 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Mon, 7 Mar 2005 19:21:06 -0800 Subject: Problem svgcoat SNF 2005-03-07 19:21:06: terrible coating on the center of the wafer Message-ID: From ratiug at snf.stanford.edu Tue Mar 8 12:43:25 2005 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Tue, 8 Mar 2005 12:43:25 -0800 Subject: Problem svgcoat SNF 2005-03-08 12:43:24: prime oven not function Message-ID: first dummy wafer stuck on the prime oven plate. And the oven didn't function after I take out the dummy wafer From vilanova at snf.stanford.edu Tue Mar 8 13:34:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Mar 2005 13:34:32 -0800 Subject: Problem svgcoat SNF 2005-03-08 12:43:24: prime oven not function Message-ID: Prime oven found Full of resist, cleaned resist from hotplate cycled wafers , ok to use. From martinez at snf.stanford.edu Tue Mar 8 15:19:29 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 8 Mar 2005 15:19:29 -0800 Subject: Problem svgcoat SNF 2005-03-07 19:21:06: terrible coating on the center of the wafer Message-ID: replaced ebr nozzle, adj ebr flow & pressure completed wpm, cycled five test wafers From mahnaz at snf.stanford.edu Wed Mar 9 11:09:12 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Mar 2005 11:09:12 -0800 Subject: Problem svgcoat SNF 2005-03-09 11:09:08: EBR splash in the center and around the edge Message-ID: Mike is working on it. From martinez at snf.stanford.edu Fri Mar 11 10:52:03 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 11 Mar 2005 10:52:03 -0800 Subject: Problem svgcoat SNF 2005-03-09 11:09:08: EBR splash in the center and around the edge Message-ID: adj ebr pressure, flow rate replaced coat module exhaust tubing cycles test wafers From lindaw at snf.stanford.edu Sat Mar 12 10:36:50 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 12 Mar 2005 10:36:50 -0800 Subject: Problem svgcoat SNF 2005-03-12 10:36:49: vapor prime won't run Message-ID: someone erased all of the vapor prime steps. I re-entered the steps from the recipe sheet, but the primer still won't run. From holdenli at snf.stanford.edu Sun Mar 13 21:32:04 2005 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Sun, 13 Mar 2005 21:32:04 -0800 Subject: Problem svgcoat SNF 2005-03-13 21:32:04: Primer's Not Working Message-ID: Have to bypass primer. From martinez at snf.stanford.edu Mon Mar 14 10:59:21 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 14 Mar 2005 10:59:21 -0800 Subject: Problem svgcoat SNF 2005-03-13 21:32:04: Primer's Not Working Message-ID: adj vapor prime hot plate vac sensor cycled wafers From martinez at snf.stanford.edu Mon Mar 14 10:59:33 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 14 Mar 2005 10:59:33 -0800 Subject: Problem svgcoat SNF 2005-03-12 10:36:49: vapor prime won't run Message-ID: problem cleared From yeh at snf.stanford.edu Fri Mar 18 20:37:47 2005 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 18 Mar 2005 20:37:47 -0800 Subject: Problem svgcoat SNF 2005-03-18 20:37:46: 5mm ebr splatters Message-ID: solvent splatter spots on resist From martinez at snf.stanford.edu Mon Mar 21 09:09:32 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 21 Mar 2005 09:09:32 -0800 Subject: Problem svgcoat SNF 2005-03-18 20:37:46: 5mm ebr splatters Message-ID: cleaned ebr nozzle, purged ebr line cycled test wafers From crichter at snf.stanford.edu Wed Mar 23 18:41:18 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 23 Mar 2005 18:41:18 -0800 Subject: Problem svgcoat SNF 2005-03-23 18:41:17: nozzle for 7 um resist not dispensing Message-ID: From vilanova at snf.stanford.edu Thu Mar 24 08:26:18 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Mar 2005 08:26:18 -0800 Subject: Problem svgcoat SNF 2005-03-23 18:41:17: nozzle for 7 um resist not dispensing Message-ID: EBR working fine , cycled wafers using different programs, ok to use. From martinez at snf.stanford.edu Thu Mar 24 14:25:21 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 24 Mar 2005 14:25:21 -0800 Subject: Problem svgcoat SNF 2005-03-24 14:25:20: SPR220 Message-ID: SPR220 resist pump is not working unable to run thick resist programs From mahnaz at snf.stanford.edu Mon Mar 28 10:02:46 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 28 Mar 2005 10:02:46 -0800 Subject: Comment svgcoat SNF 2005-03-28 10:02:45: 220-7 Message-ID: The resist can be used, although the pump make noise. Field service will be in around 11am today to work on it. From mahnaz at snf.stanford.edu Mon Mar 28 12:27:06 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 28 Mar 2005 12:27:06 -0800 Subject: Problem svgcoat SNF 2005-03-28 12:27:05: one micron suck back Message-ID: NO GOOD From vilanova at snf.stanford.edu Mon Mar 28 13:54:54 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Mar 2005 13:54:54 -0800 Subject: Problem svgcoat SNF 2005-03-28 12:27:05: one micron suck back Message-ID: adjusted Suck vacuum, cycled several wafers ,looks good ok to use. From vilanova at snf.stanford.edu Mon Mar 28 13:57:41 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Mar 2005 13:57:41 -0800 Subject: Problem svgcoat SNF 2005-03-24 14:25:20: SPR220 Message-ID: pump rebuilt by field service , tested ok ,cycled wafers , ok to use. From crichter at snf.stanford.edu Tue Mar 29 19:05:30 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 29 Mar 2005 19:05:30 -0800 Subject: Problem svgcoat SNF 2005-03-29 19:05:30: first cool plate not sensing wafers Message-ID: Second cool plate is working fine. From bongsang at snf.stanford.edu Wed Mar 30 00:16:12 2005 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Wed, 30 Mar 2005 00:16:12 -0800 Subject: Problem svgcoat SNF 2005-03-30 00:16:11: PR is not evenly coated Message-ID: 3612 PR is not coated even. From martinez at snf.stanford.edu Wed Mar 30 09:13:37 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 30 Mar 2005 09:13:37 -0800 Subject: Problem svgcoat SNF 2005-03-30 00:16:11: PR is not evenly coated Message-ID: cleaned gobs of resist from coat module wafer chuck and post bake hot plate. cleaned 3612 nozzle purged 3612 resist line. cycled 1.6um wafer uniformity is good From martinez at snf.stanford.edu Wed Mar 30 09:14:14 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 30 Mar 2005 09:14:14 -0800 Subject: Problem svgcoat SNF 2005-03-29 19:05:30: first cool plate not sensing wafers Message-ID: cycled test wafers through vp & vp chill plate NPF