Problem svgcoat SNF 2005-03-01 00:51:10: Wafer Lowering Rails on Oven are Jamming

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Tue Mar 1 00:51:11 PST 2005


When the wafer gets to the oven, the rails that lower the wafer onto the hot plate are jamming. Wafer doesn't get to the hot plate.




More information about the svgcoat-pcs mailing list