Problem svgcoat SNF 2005-03-30 00:16:11: PR is not evenly coated

martinez at snf.stanford.edu martinez at snf.stanford.edu
Wed Mar 30 09:13:37 PST 2005


cleaned gobs of resist from coat module wafer chuck
and post bake hot plate. cleaned 3612 nozzle
purged 3612 resist line. cycled 1.6um wafer
uniformity is good




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