From jhpark9 at snf.stanford.edu Mon May 2 16:29:08 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 2 May 2005 16:29:08 -0700 Subject: Problem svgcoat SNF 2005-05-02 16:29:08: transferring problem Message-ID: Wafer is not transferring from wafer cassette. Check is needed. From vilanova at snf.stanford.edu Tue May 3 07:33:12 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2005 07:33:12 -0700 Subject: Problem svgcoat SNF 2005-05-02 16:29:08: transferring problem Message-ID: Operator error, System working Fine , Cycled wafers, ok to use. From bchui at snf.stanford.edu Mon May 16 11:23:33 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 16 May 2005 11:23:33 -0700 Subject: Problem svgcoat SNF 2005-05-16 11:23:33: prime stn shows vac. error Message-ID: From martinez at snf.stanford.edu Mon May 16 13:18:38 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 16 May 2005 13:18:38 -0700 Subject: Problem svgcoat SNF 2005-05-16 11:23:33: prime stn shows vac. error Message-ID: cycled dummy wafers through prime, coater, hot plate. npf From jhpark9 at snf.stanford.edu Mon May 16 16:28:26 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 16 May 2005 16:28:26 -0700 Subject: Problem svgcoat SNF 2005-05-16 16:28:25: EBR wash step problem Message-ID: In the EBR wash step, nothing came out of the sharp pin which is for washing EBR From martinez at snf.stanford.edu Mon May 16 16:52:16 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 16 May 2005 16:52:16 -0700 Subject: Problem svgcoat SNF 2005-05-16 16:28:25: EBR wash step problem Message-ID: adj ebr canister pressure, cycled wafers From gyama at snf.stanford.edu Tue May 17 08:03:23 2005 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 17 May 2005 08:03:23 -0700 Subject: Comment svgcoat SNF 2005-05-17 08:03:22: 3612 resist out, cannot get cap off to change Message-ID: From vilanova at snf.stanford.edu Tue May 17 08:32:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 May 2005 08:32:20 -0700 Subject: Comment svgcoat SNF 2005-05-17 08:03:22: 3612 resist out, cannot get cap off to change Message-ID: helped costumer with bottle, replaced bottle, purged line , ready to go . From lindaw at snf.stanford.edu Sun May 22 12:14:55 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 22 May 2005 12:14:55 -0700 Subject: Problem svgcoat SNF 2005-05-22 12:14:54: vapor prime hot plate overtemp Message-ID: From vilanova at snf.stanford.edu Mon May 23 07:34:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 May 2005 07:34:19 -0700 Subject: Problem svgcoat SNF 2005-05-22 12:14:54: vapor prime hot plate overtemp Message-ID: Vapor prime temperature stable , I could not repeat the problem we'll keep an eye on it to monitor the temperature today, ok to use. From mahnaz at snf.stanford.edu Mon May 23 11:25:58 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 23 May 2005 11:25:58 -0700 Subject: Problem svgcoat SNF 2005-05-23 11:25:57: prime temp. Message-ID: prime temp. going up to 132 and every few wafers one wf got stuck before going in reciever. From vilanova at snf.stanford.edu Mon May 23 13:54:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 May 2005 13:54:03 -0700 Subject: Problem svgcoat SNF 2005-05-23 11:25:57: prime temp. Message-ID: adjusted temperature controller, receiver Indexer , cycled 27 wafers ok to use.