From vilanova at snf.stanford.edu Tue Nov 1 07:31:49 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Nov 2005 07:31:49 -0800 Subject: Problem svgcoat SNF 2005-10-31 19:13:54: The send indexer does not work. Message-ID: Adjusted Indexer Set screw, cycled wafers , ready to use. From vilanova at snf.stanford.edu Tue Nov 1 07:32:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Nov 2005 07:32:03 -0800 Subject: Comment svgcoat SNF 2005-10-29 11:28:48: found a bunch of resist coated swabs Message-ID: Cleared comment. From vilanova at snf.stanford.edu Tue Nov 1 07:32:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Nov 2005 07:32:13 -0800 Subject: Comment svgcoat SNF 2005-10-31 08:46:18: found a bunch more resist coated swabs in Message-ID: cleared comment. From lindaw at snf.stanford.edu Sun Nov 6 16:26:44 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 6 Nov 2005 16:26:44 -0800 Subject: Comment svgcoat SNF 2005-11-06 16:26:44: I found two more resist saturated wipes Message-ID: in the regular trash this afternoon. fortunately, the resist was dried. I did not see them there yesterday. I bagged them and put them in the hazardous waste basket. From vilanova at snf.stanford.edu Wed Nov 9 13:58:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2005 13:58:44 -0800 Subject: Shutdown svgcoat SNF 2005-11-09 13:58:43: Weekly PM In progress. ........... Message-ID: From vilanova at snf.stanford.edu Wed Nov 9 14:23:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2005 14:23:28 -0800 Subject: Comment svgcoat SNF 2005-11-06 16:26:44: I found two more resist saturated wipes Message-ID: Weekly Pm Completed, ok to use. From vilanova at snf.stanford.edu Wed Nov 9 14:23:47 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2005 14:23:47 -0800 Subject: Shutdown svgcoat SNF 2005-11-09 13:58:43: Weekly PM In progress. ........... Message-ID: Weekly Pm Completed . ready to use. From beinn at snf.stanford.edu Fri Nov 11 12:45:24 2005 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Fri, 11 Nov 2005 12:45:24 -0800 Subject: Problem svgcoat SNF 2005-11-11 12:45:23: 220-7 track1 drop or suckback problem Message-ID: Ran 2 dummy wafers, looked ok, then with process wafer a drop od semi-dried photoresist dropped on wafer. Not good coating! May be a problem with suckback. From vilanova at snf.stanford.edu Fri Nov 11 13:24:23 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Nov 2005 13:24:23 -0800 Subject: Problem svgcoat SNF 2005-11-11 12:45:23: 220-7 track1 drop or suckback problem Message-ID: I cycled wafers Using Programs # 2 7, 8, Could not repeat the problem , another user ( sanli ) ran his wafers and they also came out good, you have to remember that when Using program 4 ( thicker resist ) you have to clean the dispense hose every other wafer to get good results, Ok to use. From lindaw at snf.stanford.edu Sun Nov 20 10:05:17 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 20 Nov 2005 10:05:17 -0800 Subject: Comment svgcoat SNF 2005-11-20 10:05:16: found resist coated swabs in the regular trash Message-ID: I bagged everything in the regular trashbag, icluding the trash bag as it appeared to be contaminated with resist as well. Come on people!!!! There is NO excuse for not bagging your resist contaminated swabs and wipes. There were plenty of ziploc bags at the haz waste bin, RIGHT NEXT TO THE REGULAR TRASH BIN!!!!! From lindaw at snf.stanford.edu Sat Nov 26 09:58:22 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 26 Nov 2005 09:58:22 -0800 Subject: Comment svgcoat SNF 2005-11-26 09:58:21: found resist coated swabs in the regular garbage Message-ID: They were dry, bagged them and put in the haz waste bin. I moved the regular garbage can over next to the evalign, away from the coater. From martinez at snf.stanford.edu Tue Nov 29 08:45:10 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 29 Nov 2005 08:45:10 -0800 Subject: Shutdown svgcoat SNF 2005-11-29 08:45:09: wpm Message-ID: From martinez at snf.stanford.edu Tue Nov 29 09:30:42 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:30:42 -0800 Subject: Shutdown svgcoat SNF 2005-11-29 08:45:09: wpm Message-ID: wpm done From huangzb at snf.stanford.edu Wed Nov 30 06:26:39 2005 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Wed, 30 Nov 2005 06:26:39 -0800 Subject: Problem svgcoat SNF 2005-11-30 06:26:39: transfer didn't work at the second cooling stage Message-ID: transfer didn't work at the second cooling stage From vilanova at snf.stanford.edu Wed Nov 30 07:24:05 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Nov 2005 07:24:05 -0800 Subject: Problem svgcoat SNF 2005-11-30 06:26:39: transfer didn't work at the second cooling stage Message-ID: Operator Error Indexer and transfer Station working Perfectly Fine , CYcled wafers , Ok to use.