Problem svgcoat SNF 2005-11-11 12:45:23: 220-7 track1 drop or suckback problem

beinn at snf.stanford.edu beinn at snf.stanford.edu
Fri Nov 11 12:45:24 PST 2005


Ran 2 dummy wafers, looked ok, then with process wafer a drop od semi-dried photoresist dropped on wafer. Not good coating! May be a problem with suckback.




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