Problem svgcoat SNF 2005-11-11 12:45:23: 220-7 track1 drop or suckback problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Nov 11 13:24:23 PST 2005


I cycled wafers Using Programs # 2 7, 8,  Could not repeat the
problem , another user  ( sanli ) ran his wafers and they also
came out good, you have to remember that when Using 
program 4 ( thicker resist ) you have to clean the dispense hose every other wafer to get good results, Ok to use.  




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