From lindaw at snf.stanford.edu Sat Oct 1 12:28:43 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 1 Oct 2005 12:28:43 -0700 Subject: Comment svgcoat SNF 2005-10-01 12:28:42: found resist all over the spin chuck this morning Message-ID: I cleaned it off. From vilanova at snf.stanford.edu Mon Oct 3 06:33:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Oct 2005 06:33:10 -0700 Subject: Comment svgcoat SNF 2005-10-01 12:28:42: found resist all over the spin chuck this morning Message-ID: User Cleaned CHuck, ok to use. From cbellew at snf.stanford.edu Wed Oct 12 13:53:09 2005 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Wed, 12 Oct 2005 13:53:09 -0700 Subject: Problem svgcoat SNF 2005-10-12 13:53:09: Cassette sensing finger needs adjustment Message-ID: The send cassette platform isn't sensing the cassette; it needs adjustment. From martinez at snf.stanford.edu Wed Oct 12 14:15:43 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 12 Oct 2005 14:15:43 -0700 Subject: Problem svgcoat SNF 2005-10-12 13:53:09: Cassette sensing finger needs adjustment Message-ID: adjust finger, cassette sensed From martinez at snf.stanford.edu Fri Oct 14 09:02:06 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 14 Oct 2005 09:02:06 -0700 Subject: Shutdown svgcoat SNF 2005-10-14 09:02:05: weekly pm Message-ID: From martinez at snf.stanford.edu Fri Oct 14 09:59:27 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 14 Oct 2005 09:59:27 -0700 Subject: Shutdown svgcoat SNF 2005-10-14 09:02:05: weekly pm Message-ID: wpm done From mahnaz at snf.stanford.edu Mon Oct 17 10:18:53 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 17 Oct 2005 10:18:53 -0700 Subject: Problem svgcoat SNF 2005-10-17 10:18:51: bad EBR Message-ID: I see some EBR splash all the way to the center of wafers From martinez at snf.stanford.edu Mon Oct 17 13:41:56 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 17 Oct 2005 13:41:56 -0700 Subject: Problem svgcoat SNF 2005-10-17 10:18:51: bad EBR Message-ID: cleaned ebr nozzle, replaced catchcup cycled 5 test wafers prog#7 ebr arm#6 no splash back From gibby at snf.stanford.edu Fri Oct 21 21:10:58 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Fri, 21 Oct 2005 21:10:58 -0700 Subject: Problem svgcoat SNF 2005-10-21 21:10:57: PR Dripping on wafer during EBR Message-ID: PR kept dripping on my wafer during EBR, leading to a very non-uniform coat. From vilanova at snf.stanford.edu Mon Oct 24 07:57:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Oct 2005 07:57:32 -0700 Subject: Problem svgcoat SNF 2005-10-21 21:10:57: PR Dripping on wafer during EBR Message-ID: EBR canister was almost empty that's why there was a large gap of air in the line making the EBR dispense Dripping On center of wafer, Refilled canister , cleaned resist from chuck and EBR dispense ( bottom and top ) cucled wafers Ready to use. From lindaw at snf.stanford.edu Sat Oct 29 11:28:49 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 29 Oct 2005 11:28:49 -0700 Subject: Comment svgcoat SNF 2005-10-29 11:28:48: found a bunch of resist coated swabs Message-ID: in the regular trash. There was also a resist coated glass/clear wafer and the post bake chuck was very heavily contaminated with thick resist. I put the swabs and wafer in a baggie, and put it in the haz. waste container. From lindaw at snf.stanford.edu Mon Oct 31 08:46:19 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 31 Oct 2005 08:46:19 -0800 Subject: Comment svgcoat SNF 2005-10-31 08:46:18: found a bunch more resist coated swabs in Message-ID: the regular garbage bin next to the svgcoat tracks. I put them in a baggie and placed them in the hazardous waste bin. There were also a bunch of loose resist caoted swabs in the hazardous waste bin. I bagged them with the others. From martinez at snf.stanford.edu Mon Oct 31 09:06:23 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 31 Oct 2005 09:06:23 -0800 Subject: Shutdown svgcoat SNF 2005-10-31 09:06:23: WPM Message-ID: From martinez at snf.stanford.edu Mon Oct 31 10:07:38 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 31 Oct 2005 10:07:38 -0800 Subject: Shutdown svgcoat SNF 2005-10-31 09:06:23: WPM Message-ID: wpm done From rubenluo at snf.stanford.edu Mon Oct 31 19:13:55 2005 From: rubenluo at snf.stanford.edu (rubenluo at snf.stanford.edu) Date: Mon, 31 Oct 2005 19:13:55 -0800 Subject: Problem svgcoat SNF 2005-10-31 19:13:54: The send indexer does not work. Message-ID: