Problem svgcoat SNF 2005-10-17 10:18:51: bad EBR
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Mon Oct 17 10:18:53 PDT 2005
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Shutdown svgcoat SNF 2005-10-14 09:02:05: weekly pm
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Problem svgcoat SNF 2005-10-17 10:18:51: bad EBR
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I see some EBR splash all the way to the center of wafers
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Shutdown svgcoat SNF 2005-10-14 09:02:05: weekly pm
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Problem svgcoat SNF 2005-10-17 10:18:51: bad EBR
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