Problem svgcoat SNF 2005-10-21 21:10:57: PR Dripping on wafer during EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 24 07:57:32 PDT 2005


EBR canister was almost empty that's why there was a large
gap of  air  in the line making the EBR dispense Dripping
On center of wafer, Refilled canister , cleaned resist from 
chuck and EBR dispense ( bottom and top ) cucled wafers
Ready to use.  




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