Problem svgcoat SNF 2005-10-21 21:10:57: PR Dripping on wafer during EBR

[vilanova at snf.stanford.edu]

EBR canister was almost empty that's why there was a large
gap of  air  in the line making the EBR dispense Dripping
On center of wafer, Refilled canister , cleaned resist from 
chuck and EBR dispense ( bottom and top ) cucled wafers
Ready to use.