From martinez at snf.stanford.edu Fri Sep 2 08:48:48 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 2 Sep 2005 08:48:48 -0700 Subject: Shutdown svgcoat SNF 2005-09-02 08:48:48: weekly pm Message-ID: From martinez at snf.stanford.edu Fri Sep 2 09:50:27 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 2 Sep 2005 09:50:27 -0700 Subject: Shutdown svgcoat SNF 2005-09-02 08:48:48: weekly pm Message-ID: wpm done From harshal at snf.stanford.edu Fri Sep 2 19:47:16 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Fri, 2 Sep 2005 19:47:16 -0700 Subject: Problem svgcoat SNF 2005-09-02 19:47:15: transport problem on prime chuck. Message-ID: two successive wafers slipped from the belt and broke on the chuck. wafer pieces lying on the chuck, unable to remove. From jackson at snf.stanford.edu Sun Sep 4 09:42:07 2005 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 4 Sep 2005 09:42:07 -0700 Subject: Problem svgcoat SNF 2005-09-04 09:42:07: prime station Message-ID: wafer found broken on prime chuck From true at snf.stanford.edu Sun Sep 4 19:22:43 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Sun, 4 Sep 2005 19:22:43 -0700 Subject: Problem svgcoat SNF 2005-09-04 19:22:42: edge bead dripping Message-ID: caused flecks on spun wafers, using prog#7 From vilanova at snf.stanford.edu Tue Sep 6 08:20:55 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Sep 2005 08:20:55 -0700 Subject: Problem svgcoat SNF 2005-09-02 19:47:15: transport problem on prime chuck. Message-ID: Check Transport Problem On prime chuck , Indexer working Fine, Also Adjusted EBR Dispense CLeaned Catch Cup , removed Broken Wafer, Cleaned Exhaust system , Cycled 10 wafers , ok to use. From vilanova at snf.stanford.edu Tue Sep 6 08:21:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Sep 2005 08:21:20 -0700 Subject: Problem svgcoat SNF 2005-09-04 09:42:07: prime station Message-ID: Prime Station WOrkinf FIne, read Previous Message. From vilanova at snf.stanford.edu Tue Sep 6 08:23:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Sep 2005 08:23:28 -0700 Subject: Problem svgcoat SNF 2005-09-04 19:22:42: edge bead dripping Message-ID: Adjusted EBR Dispense , CLeaned Exhaust system , removed Wafers parts from catch cup , cycled wafers , reayd to use. From true at snf.stanford.edu Wed Sep 7 13:18:02 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Wed, 7 Sep 2005 13:18:02 -0700 Subject: Problem svgcoat SNF 2005-09-07 13:18:01: edge bead dripping again Message-ID: same problem as before, getting flecks on coated wafers, saw EBR nozzle drip onto wet resist pre-spin From martinez at snf.stanford.edu Wed Sep 7 14:40:46 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 7 Sep 2005 14:40:46 -0700 Subject: Problem svgcoat SNF 2005-09-07 13:18:01: edge bead dripping again Message-ID: reduced ebr canister n2 pressure cycled 5 test wafers. ready for use From jhpark9 at snf.stanford.edu Mon Sep 12 16:44:07 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 12 Sep 2005 16:44:07 -0700 Subject: Problem svgcoat SNF 2005-09-12 16:44:06: pin problem Message-ID: Drop of the liquid, which is for EBR washing, falls on the wafer from the tip of the pin while coating. From vilanova at snf.stanford.edu Tue Sep 13 07:39:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2005 07:39:28 -0700 Subject: Problem svgcoat SNF 2005-09-12 16:44:06: pin problem Message-ID: Adjusted EBR Flow, Cycled Many wafers , ready to use. From true at snf.stanford.edu Wed Sep 14 15:31:31 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Wed, 14 Sep 2005 15:31:31 -0700 Subject: Problem svgcoat SNF 2005-09-14 15:31:30: EBR dripping on wafer Message-ID: 3rd time reporting this same problem in the last 2 weeks EBR nozzle drips onto frontside of wafer, after resist dispense but before spin at 5.5krpm, using prog #7 please don't clear the problem until it's fixed problem may be intermittant (but it seems to happend every time I use it) From martinez at snf.stanford.edu Thu Sep 15 09:46:21 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 15 Sep 2005 09:46:21 -0700 Subject: Problem svgcoat SNF 2005-09-14 15:31:30: EBR dripping on wafer Message-ID: cycled 5 test wafers, could not duplicate problem. will contact lab user and help him with his wafers From xiangli at snf.stanford.edu Tue Sep 20 13:29:24 2005 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Tue, 20 Sep 2005 13:29:24 -0700 Subject: Problem svgcoat SNF 2005-09-20 13:29:13: The loading stage doesnt work Message-ID: From vilanova at snf.stanford.edu Wed Sep 21 07:21:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Sep 2005 07:21:03 -0700 Subject: Problem svgcoat SNF 2005-09-20 13:29:13: The loading stage doesnt work Message-ID: adjusted Indexer Sensor, cycled wafers , ready to use. :-) From king at snf.stanford.edu Thu Sep 22 12:09:02 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 22 Sep 2005 12:09:02 -0700 Subject: Problem svgcoat SNF 2005-09-22 12:09:00: SVGcoat1 input station Message-ID: won't move down to the track. Have tried the usual with no success. thanks. From martinez at snf.stanford.edu Thu Sep 22 13:43:58 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 22 Sep 2005 13:43:58 -0700 Subject: Problem svgcoat SNF 2005-09-22 12:09:00: SVGcoat1 input station Message-ID: cycled two test wafers no problem found From martinez at snf.stanford.edu Fri Sep 23 08:53:30 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Sep 2005 08:53:30 -0700 Subject: Shutdown svgcoat SNF 2005-09-23 08:53:29: WPM Message-ID: From martinez at snf.stanford.edu Fri Sep 23 10:03:41 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Sep 2005 10:03:41 -0700 Subject: Shutdown svgcoat SNF 2005-09-23 08:53:29: WPM Message-ID: weekly pm done From gibby at snf.stanford.edu Sat Sep 24 09:50:30 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 24 Sep 2005 09:50:30 -0700 Subject: Comment svgcoat SNF 2005-09-24 09:50:29: Receive Cassette index Message-ID: System would not index receive cassette at the start of the run. Probably user error. From lindaw at snf.stanford.edu Sat Sep 24 10:27:21 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 24 Sep 2005 10:27:21 -0700 Subject: Problem svgcoat SNF 2005-09-24 10:27:20: EBR needle too low, scratching wafers Message-ID: EBR dispensing tip is contacting wafer (1mm thick) during spin, thus scratching and surface of wafers. From vilanova at snf.stanford.edu Mon Sep 26 07:43:43 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Sep 2005 07:43:43 -0700 Subject: Comment svgcoat SNF 2005-09-24 09:50:29: Receive Cassette index Message-ID: Receive and Send Indexers working Fine, operator error, ok to use. From vilanova at snf.stanford.edu Mon Sep 26 07:44:17 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Sep 2005 07:44:17 -0700 Subject: Problem svgcoat SNF 2005-09-24 10:27:20: EBR needle too low, scratching wafers Message-ID: adjsuted EBR Dispense Needle, Cycled wafers , tested , ready to use. From king at snf.stanford.edu Mon Sep 26 13:19:57 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 26 Sep 2005 13:19:57 -0700 Subject: Comment svgcoat SNF 2005-09-26 13:19:55: Just a courtesy comment - SVGtrack1 Message-ID: is getting low on 3612 PR. I am not using this equipment. From vilanova at snf.stanford.edu Mon Sep 26 14:31:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Sep 2005 14:31:16 -0700 Subject: Comment svgcoat SNF 2005-09-26 13:19:55: Just a courtesy comment - SVGtrack1 Message-ID: replaced empty resist bottle and purged line , ready to use.