Problem svgcoat SNF 2005-09-02 19:47:15: transport problem on prime chuck.
harshal at snf.stanford.edu
harshal at snf.stanford.edu
Fri Sep 2 19:47:16 PDT 2005
two successive wafers slipped from the belt and broke on the chuck. wafer pieces lying on the chuck, unable to remove.
More information about the svgcoat-pcs
mailing list