Problem svgcoat SNF 2005-09-02 19:47:15: transport problem on prime chuck.

vilanova at vilanova at
Tue Sep 6 08:20:55 PDT 2005

Check Transport Problem  On prime chuck ,  Indexer working
Fine,  Also Adjusted EBR Dispense CLeaned Catch Cup , 
removed Broken Wafer, Cleaned Exhaust system , Cycled
10 wafers , ok to use. 

More information about the svgcoat-pcs mailing list