Problem svgcoat SNF 2005-09-02 19:47:15: transport problem on prime chuck.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 6 08:20:55 PDT 2005


Check Transport Problem  On prime chuck ,  Indexer working
Fine,  Also Adjusted EBR Dispense CLeaned Catch Cup , 
removed Broken Wafer, Cleaned Exhaust system , Cycled
10 wafers , ok to use. 




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