Problem svgcoat SNF 2005-09-04 19:22:42: edge bead dripping

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 6 08:23:28 PDT 2005


Adjusted EBR Dispense , CLeaned Exhaust system , removed 
Wafers parts from catch cup , cycled wafers , reayd to use. 




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