Problem svgcoat SNF 2005-09-14 15:31:30: EBR dripping on wafer

true at snf.stanford.edu true at snf.stanford.edu
Wed Sep 14 15:31:31 PDT 2005


3rd time reporting this same problem in the last 2 weeks
EBR nozzle drips onto frontside of wafer, after resist dispense but before spin at 5.5krpm, using prog #7
please don't clear the problem until it's fixed
problem may be intermittant (but it seems to happend every time I use it)




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