Problem svgcoat SNF 2005-09-24 10:27:20: EBR needle too low, scratching wafers

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Sep 24 10:27:21 PDT 2005


EBR dispensing tip is contacting wafer (1mm thick) during spin, thus scratching and surface of wafers.




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