From treviscrane at snf.stanford.edu Sun Apr 2 10:57:28 2006 From: treviscrane at snf.stanford.edu (treviscrane at snf.stanford.edu) Date: Sun, 2 Apr 2006 10:57:28 -0700 Subject: Problem svgcoat SNF 2006-04-02 10:57:28: continuous beeping Message-ID: Pressing clear doesn't make the beeping stop, but the track still works fine. It's driving me nuts, but everything seems to work. From vilanova at snf.stanford.edu Mon Apr 3 07:11:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Apr 2006 07:11:25 -0700 Subject: Problem svgcoat SNF 2006-04-02 10:57:28: continuous beeping Message-ID: The Alarm Always Beep When you run the thick resist program, Like I said before , All you have to do is press "ENTER" on the Controller in the Bottom Panel On your Right Hand side. From kkumar at snf.stanford.edu Mon Apr 3 16:50:14 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Mon, 3 Apr 2006 16:50:14 -0700 Subject: Problem svgcoat SNF 2006-04-03 16:50:13: SPR220-7 dispenser not working Message-ID: SPR220-7 resist dispenser will not dispense resist onto the wafer. The program gets stuck in the dispense step. It happened with both pgm 4 & 6. From aeonia at snf.stanford.edu Tue Apr 4 03:07:28 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Tue, 4 Apr 2006 03:07:28 -0700 Subject: Problem svgcoat SNF 2006-04-04 03:07:27: 7um PR doesn't dispense Message-ID: There was no report or comment. From vilanova at snf.stanford.edu Tue Apr 4 08:03:29 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Apr 2006 08:03:29 -0700 Subject: Problem svgcoat SNF 2006-04-03 16:50:13: SPR220-7 dispenser not working Message-ID: re-initialized cybor pump controller settings, cycled wafers system dispensing GREAT! , ready to use. From vilanova at snf.stanford.edu Tue Apr 4 08:03:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Apr 2006 08:03:54 -0700 Subject: Problem svgcoat SNF 2006-04-04 03:07:27: 7um PR doesn't dispense Message-ID: System Program 6 and 7 working fine , cycled wafers , ok to use. From vilanova at snf.stanford.edu Tue Apr 4 09:55:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Apr 2006 09:55:07 -0700 Subject: Shutdown svgcoat SNF 2006-04-04 09:55:06: Weekly Maintenance in progress..... Message-ID: From vilanova at snf.stanford.edu Tue Apr 4 10:54:29 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Apr 2006 10:54:29 -0700 Subject: Shutdown svgcoat SNF 2006-04-04 09:55:06: Weekly Maintenance in progress..... Message-ID: Weekly PM Completed. ok to use From treviscrane at snf.stanford.edu Wed Apr 5 13:35:37 2006 From: treviscrane at snf.stanford.edu (treviscrane at snf.stanford.edu) Date: Wed, 5 Apr 2006 13:35:37 -0700 Subject: Problem svgcoat SNF 2006-04-05 13:35:37: quieter slower constant beeping Message-ID: clearing doesn't help[ From vilanova at snf.stanford.edu Wed Apr 5 14:06:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Apr 2006 14:06:56 -0700 Subject: Problem svgcoat SNF 2006-04-05 13:35:37: quieter slower constant beeping Message-ID: I showed the User how to stop Alarm , Process ok now . good to use. From praveen at snf.stanford.edu Thu Apr 6 21:24:34 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Thu, 6 Apr 2006 21:24:34 -0700 Subject: Comment svgcoat SNF 2006-04-06 21:24:33: 2mm edge bead is not working on Coat#4 Message-ID: 2mm edge bead removal is not working on Coat#4 of track1 From vilanova at snf.stanford.edu Fri Apr 7 09:25:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Apr 2006 09:25:52 -0700 Subject: Comment svgcoat SNF 2006-04-06 21:24:33: 2mm edge bead is not working on Coat#4 Message-ID: Adjusted EBR Arm, ok to use. From jrjain at snf.stanford.edu Fri Apr 7 12:08:54 2006 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 7 Apr 2006 12:08:54 -0700 Subject: Problem svgcoat SNF 2006-04-07 12:08:52: EBR Problem Message-ID: EBR comes out at an odd angle away from the wafer perimeter. From vilanova at snf.stanford.edu Fri Apr 7 14:13:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Apr 2006 14:13:49 -0700 Subject: Problem svgcoat SNF 2006-04-07 12:08:52: EBR Problem Message-ID: Cycled wafer , Ran Programs 4, 6, 7, 8, , no problem found ok to use. From ankushg at snf.stanford.edu Mon Apr 10 09:32:42 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 10 Apr 2006 09:32:42 -0700 Subject: Problem svgcoat SNF 2006-04-10 09:32:41: EBR is not clean along the edges and 7um is highly non-uniform Message-ID: From ankushg at snf.stanford.edu Mon Apr 10 13:01:35 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 10 Apr 2006 13:01:35 -0700 Subject: Problem svgcoat SNF 2006-04-10 13:01:35: Extra drop coming out during the completion of spin phase Message-ID: From vilanova at snf.stanford.edu Mon Apr 10 13:52:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Apr 2006 13:52:58 -0700 Subject: Problem svgcoat SNF 2006-04-10 09:32:41: EBR is not clean along the edges and 7um is highly non-uniform Message-ID: purged resist line ,adjusted EBR and Suck back, cycled wafers , ready to use. From vilanova at snf.stanford.edu Mon Apr 10 15:11:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Apr 2006 15:11:24 -0700 Subject: Problem svgcoat SNF 2006-04-10 15:11:23: testing coral system Message-ID: From vilanova at snf.stanford.edu Mon Apr 10 15:12:12 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Apr 2006 15:12:12 -0700 Subject: Problem svgcoat SNF 2006-04-10 15:11:23: testing coral system Message-ID: Ok to use. From uyoon at snf.stanford.edu Thu Apr 13 08:54:37 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 13 Apr 2006 08:54:37 -0700 Subject: Shutdown svgcoat SNF 2006-04-13 08:54:37: problem with receiving chuck Message-ID: belt level is lower than chuck and it doesn't send a wafer to receiving cassette From vilanova at snf.stanford.edu Thu Apr 13 09:27:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Apr 2006 09:27:49 -0700 Subject: Shutdown svgcoat SNF 2006-04-13 08:54:37: problem with receiving chuck Message-ID: Cycled Wafers Receiving cassette Working Fyne , ready to use. From ankushg at snf.stanford.edu Mon Apr 17 09:45:20 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 17 Apr 2006 09:45:20 -0700 Subject: Problem svgcoat SNF 2006-04-17 09:45:16: Poor EBR Message-ID: From vilanova at snf.stanford.edu Mon Apr 17 10:07:26 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Apr 2006 10:07:26 -0700 Subject: Problem svgcoat SNF 2006-04-17 09:45:16: Poor EBR Message-ID: Cleaned Dispense Tip Hose with q-tips , cycled programas 7 & 4 , Wafers looks Good, ok to use. From vilanova at snf.stanford.edu Tue Apr 18 10:11:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Apr 2006 10:11:43 -0700 Subject: Shutdown svgcoat SNF 2006-04-18 10:11:42: MOnthly Pm In progress..... Message-ID: From vilanova at snf.stanford.edu Tue Apr 18 11:23:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Apr 2006 11:23:14 -0700 Subject: Shutdown svgcoat SNF 2006-04-18 10:11:42: MOnthly Pm In progress..... Message-ID: MOnthly PM Completed, cleaned HMDS hotplate & postbake Plate Cleaned. catch cup, rails,belts, replaced and calibrated Spindle , cycled wafers , ready to use. From ankushg at snf.stanford.edu Mon Apr 24 10:03:50 2006 From: ankushg at snf.stanford.edu (ankushg at snf.stanford.edu) Date: Mon, 24 Apr 2006 10:03:50 -0700 Subject: Problem svgcoat SNF 2006-04-24 10:03:49: EBR is not uniform Message-ID: From vilanova at snf.stanford.edu Mon Apr 24 14:17:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Apr 2006 14:17:43 -0700 Subject: Problem svgcoat SNF 2006-04-24 10:03:49: EBR is not uniform Message-ID: EBR Working Fine , ready to use. From aeonia at snf.stanford.edu Wed Apr 26 02:32:28 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Wed, 26 Apr 2006 02:32:28 -0700 Subject: Problem svgcoat SNF 2006-04-26 02:32:27: hot plate off Message-ID: The hot plate is not hot at all. From vilanova at snf.stanford.edu Wed Apr 26 08:01:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Apr 2006 08:01:27 -0700 Subject: Problem svgcoat SNF 2006-04-26 02:32:27: hot plate off Message-ID: Initialized Post Bake Hotplate ( it Was Off for some reason ) Turned System back on , Calibrated Hotplate , ready to use. From vipin at snf.stanford.edu Wed Apr 26 22:10:41 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 26 Apr 2006 22:10:41 -0700 Subject: Shutdown svgcoat SNF 2006-04-26 22:10:40: Message-ID: wafer not sensed at the cassete indexer, does not move forward From vilanova at snf.stanford.edu Thu Apr 27 07:24:45 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Apr 2006 07:24:45 -0700 Subject: Shutdown svgcoat SNF 2006-04-26 22:10:40: Message-ID: System Is Working Fine , Cycled Several wafer and I couldn,t Repeat the problem, ready to use. From vilanova at snf.stanford.edu Thu Apr 27 11:01:02 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Apr 2006 11:01:02 -0700 Subject: Shutdown svgcoat SNF 2006-04-27 11:01:01: Maintenance in progress..... Message-ID: