Problem svgcoat SNF 2006-04-03 16:50:13: SPR220-7 dispenser not working

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Mon Apr 3 16:50:14 PDT 2006


SPR220-7 resist dispenser will not dispense resist onto the wafer. The program gets stuck in the dispense step. It happened with both pgm 4 & 6.




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