Problem svgcoat SNF 2006-04-10 09:32:41: EBR is not clean along the edges and 7um is highly non-uniform

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 10 13:52:58 PDT 2006


purged resist line ,adjusted EBR and Suck back, cycled 
wafers , ready to use. 




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