Shutdown svgcoat SNF 2006-04-18 10:11:42: MOnthly Pm In progress.....

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Apr 18 11:23:14 PDT 2006


MOnthly PM Completed, cleaned HMDS hotplate & postbake
Plate Cleaned. catch cup, rails,belts, replaced and calibrated 
Spindle , cycled wafers , ready to use. 




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