Shutdown svgcoat SNF 2006-04-26 22:10:40:
vipin at snf.stanford.edu
vipin at snf.stanford.edu
Wed Apr 26 22:10:41 PDT 2006
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Problem svgcoat SNF 2006-04-26 02:32:27: hot plate off
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Shutdown svgcoat SNF 2006-04-26 22:10:40:
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wafer not sensed at the cassete indexer, does not move forward
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Problem svgcoat SNF 2006-04-26 02:32:27: hot plate off
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Shutdown svgcoat SNF 2006-04-26 22:10:40:
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