From vilanova at snf.stanford.edu Thu Aug 3 13:13:57 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Aug 2006 13:13:57 -0700 Subject: Problem svgcoat SNF 2006-07-31 15:13:41: Thick resist Dispense not working, we'll work on it tomorrow. Message-ID: thick resist ok , controller back from vendor, cycled wafers ready to use. From king at snf.stanford.edu Fri Aug 4 23:58:04 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 4 Aug 2006 23:58:04 -0700 Subject: Problem svgcoat SNF 2006-08-04 23:58:03: HMDS cooling station Message-ID: It's at room temperature (compare it to track 2). Wafers may be too warm to spin. From me342d at snf.stanford.edu Sun Aug 6 13:58:40 2006 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Sun, 6 Aug 2006 13:58:40 -0700 Subject: Problem svgcoat SNF 2006-08-06 13:58:39: CYBOR box under SVGcoat alarming Message-ID: The CYBOR box under the svgcoat alarms right after spr220-7 dispense event on program 6. pressed enter button on box each time to silence alarm and continue. From vilanova at snf.stanford.edu Mon Aug 7 07:15:41 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Aug 2006 07:15:41 -0700 Subject: Problem svgcoat SNF 2006-08-04 23:58:03: HMDS cooling station Message-ID: Refilled HMDS Canister, NOrmal Temperature 125oC. Ok to Use. From changyol at snf.stanford.edu Mon Aug 7 09:05:43 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 7 Aug 2006 09:05:43 -0700 Subject: Problem svgcoat SNF 2006-08-06 13:58:39: CYBOR box under SVGcoat alarming Message-ID: cleared alarm sense for dispense 2 from config mode. From yeh at snf.stanford.edu Mon Aug 7 21:26:23 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 7 Aug 2006 21:26:23 -0700 Subject: Problem svgcoat SNF 2006-08-07 21:26:22: spr220-7 won't dispense Message-ID: tried recipe #4, 6, and prime 2. spr220-7 will not dispense. From vilanova at snf.stanford.edu Tue Aug 8 09:39:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Aug 2006 09:39:00 -0700 Subject: Problem svgcoat SNF 2006-08-07 21:26:22: spr220-7 won't dispense Message-ID: thick resist working fine, Initialized controller settings , cycled wafers ok to use, we will adjust the dispense flow for the thick resist around 11AM today 8/8/06 . From chozone at snf.stanford.edu Tue Aug 8 15:42:17 2006 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Tue, 8 Aug 2006 15:42:17 -0700 Subject: Problem svgcoat SNF 2006-08-08 15:42:16: A test wafer is sticking in the coater Message-ID: From vilanova at snf.stanford.edu Wed Aug 9 07:25:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 07:25:25 -0700 Subject: Problem svgcoat SNF 2006-08-08 15:42:16: A test wafer is sticking in the coater Message-ID: cycled wafers, I could not repeath the problem, coater working Fine , ok to use. From mahnaz at snf.stanford.edu Wed Aug 9 11:56:48 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Aug 2006 11:56:48 -0700 Subject: Shutdown svgcoat SNF 2006-08-09 11:56:48: 7 um is down, sesor is dirty Message-ID: wafers will not go down and will not start. From vilanova at snf.stanford.edu Wed Aug 9 14:41:06 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 14:41:06 -0700 Subject: Shutdown svgcoat SNF 2006-08-09 11:56:48: 7 um is down, sesor is dirty Message-ID: replaced TOP spindle solenoid valve, replaced leaky HMDS canister, adjusted program 4 and 6 Thick resist dispense cycled wafers , ok to use. IF FOR SOME REASON THE ALARM GOES OFF WHILE DISPENSING THICK RESIST , JUST PRESS TEST ON THE CONTROLLER ( BOTTOM RIGHT HAND SIDE WINDOW) AND THAT WILL STOP THE ALARM I WILL FIX IT TOMORROW MORNING! :-) From me342f at snf.stanford.edu Sun Aug 13 19:25:39 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Sun, 13 Aug 2006 19:25:39 -0700 Subject: Problem svgcoat SNF 2006-08-13 19:25:38: hmds low Message-ID: alarm sounds From praveen at snf.stanford.edu Tue Aug 15 18:17:59 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Tue, 15 Aug 2006 18:17:59 -0700 Subject: Comment svgcoat SNF 2006-08-15 18:17:59: 7micron resist not in stock Message-ID: 7micron resist not in stock From vilanova at snf.stanford.edu Wed Aug 16 09:35:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Aug 2006 09:35:40 -0700 Subject: Comment svgcoat SNF 2006-08-15 18:17:59: 7micron resist not in stock Message-ID: Replaced empty resist bottle , purged line, ok to use. From mahnaz at snf.stanford.edu Thu Aug 17 09:31:45 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Aug 2006 09:31:45 -0700 Subject: Comment svgcoat SNF 2006-08-17 09:31:44: I restarted the trac Message-ID: Wrong program , reprogrammed, ok to use. From mahnaz at snf.stanford.edu Thu Aug 17 10:42:43 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Aug 2006 10:42:43 -0700 Subject: Comment svgcoat SNF 2006-08-17 10:42:36: cleaned hot plate and purged more acetone Message-ID: From hyunjoo at snf.stanford.edu Thu Aug 17 14:26:13 2006 From: hyunjoo at snf.stanford.edu (hyunjoo at snf.stanford.edu) Date: Thu, 17 Aug 2006 14:26:13 -0700 Subject: Problem svgcoat SNF 2006-08-17 14:26:13: 1.6um not uniform Message-ID: From changyol at snf.stanford.edu Thu Aug 17 16:16:09 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 17 Aug 2006 16:16:09 -0700 Subject: Comment svgcoat SNF 2006-08-17 09:31:44: I restarted the trac Message-ID: done. From changyol at snf.stanford.edu Thu Aug 17 16:16:24 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 17 Aug 2006 16:16:24 -0700 Subject: Comment svgcoat SNF 2006-08-17 10:42:36: cleaned hot plate and purged more acetone Message-ID: done. From changyol at snf.stanford.edu Thu Aug 17 16:18:19 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 17 Aug 2006 16:18:19 -0700 Subject: Problem svgcoat SNF 2006-08-17 14:26:13: 1.6um not uniform Message-ID: checked program #8 and dispense and centering are fine. please! try again. From mislam at snf.stanford.edu Sat Aug 19 09:16:25 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 19 Aug 2006 09:16:25 -0700 Subject: Problem svgcoat SNF 2006-08-19 09:16:24: No power Message-ID: From aokyay at snf.stanford.edu Sat Aug 19 13:07:07 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 19 Aug 2006 13:07:07 -0700 Subject: Problem svgcoat SNF 2006-08-19 13:07:06: arm not moving to position Message-ID: cycled after the power failure. seems like all the programs are erased. manually entered, but arm will not move to specified location From changyol at snf.stanford.edu Mon Aug 21 08:27:00 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 21 Aug 2006 08:27:00 -0700 Subject: Problem svgcoat SNF 2006-08-19 09:16:24: No power Message-ID: it is ok. From changyol at snf.stanford.edu Mon Aug 21 08:28:40 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Mon, 21 Aug 2006 08:28:40 -0700 Subject: Problem svgcoat SNF 2006-08-19 13:07:06: arm not moving to position Message-ID: ran prog #7 without problem. some prog has been erased. just need reprograms. From vilanova at snf.stanford.edu Mon Aug 21 11:33:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Aug 2006 11:33:54 -0700 Subject: Shutdown svgcoat SNF 2006-08-21 11:33:54: arm programs missing. Message-ID: From vilanova at snf.stanford.edu Mon Aug 21 13:49:41 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Aug 2006 13:49:41 -0700 Subject: Shutdown svgcoat SNF 2006-08-21 11:33:54: arm programs missing. Message-ID: Entered All programs, ( regular ones and arm programs too ) Cycled wafers ok to use. From vilanova at snf.stanford.edu Mon Aug 21 13:50:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 Aug 2006 13:50:51 -0700 Subject: Problem svgcoat SNF 2006-08-21 13:50:51: DIspense for programs # 4 and #6 still bad Message-ID: Dispense for thick resist programs 4 and 6 still bad, I will work on it today or tomorrow. From king at snf.stanford.edu Tue Aug 22 16:14:45 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 22 Aug 2006 16:14:45 -0700 Subject: Problem svgcoat SNF 2006-08-22 16:14:44: Dirt/Crud in the PR Message-ID: Small chunks or dried PR? causing streaks and defects. Wafers had had sulfuric clean previously. From king at snf.stanford.edu Tue Aug 22 16:33:34 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 22 Aug 2006 16:33:34 -0700 Subject: Problem svgcoat SNF 2006-08-22 16:33:34: EBR stream missed the wafer Message-ID: using setpoint 6. Thanks. From vilanova at snf.stanford.edu Wed Aug 23 17:50:57 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Aug 2006 17:50:57 -0700 Subject: Problem svgcoat SNF 2006-08-21 13:50:51: DIspense for programs # 4 and #6 still bad Message-ID: program # 4, 6, working fine, nothing wrong with the controller , there was some of the arm programs missing , Cleaned EBR nozzle and dispense hose , adjusted HMDS Cap Canister , no more leaks , cycled wafers , ok to use. From vilanova at snf.stanford.edu Wed Aug 23 17:51:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Aug 2006 17:51:18 -0700 Subject: Problem svgcoat SNF 2006-08-22 16:14:44: Dirt/Crud in the PR Message-ID: Please , Read previous message. From vilanova at snf.stanford.edu Wed Aug 23 17:51:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Aug 2006 17:51:54 -0700 Subject: Problem svgcoat SNF 2006-08-22 16:33:34: EBR stream missed the wafer Message-ID: Everything working good now, ok to use, OI,m tired i,m going home bye . From changyol at snf.stanford.edu Thu Aug 24 11:37:14 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 24 Aug 2006 11:37:14 -0700 Subject: Comment svgcoat SNF 2006-08-24 11:37:14: about svg#1 Message-ID: we make disable alarm for prog4 and 6 (thick resist) at cybo controller. tested both programs that came out good. ready to use. From gyama at snf.stanford.edu Fri Aug 25 07:53:00 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 25 Aug 2006 07:53:00 -0700 Subject: Problem svgcoat SNF 2006-08-25 07:52:59: not sensing wafer at VP station Message-ID: From changyol at snf.stanford.edu Fri Aug 25 08:35:13 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Fri, 25 Aug 2006 08:35:13 -0700 Subject: Comment svgcoat SNF 2006-08-24 11:37:14: about svg#1 Message-ID: ok. From changyol at snf.stanford.edu Fri Aug 25 08:36:37 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Fri, 25 Aug 2006 08:36:37 -0700 Subject: Problem svgcoat SNF 2006-08-25 07:52:59: not sensing wafer at VP station Message-ID: initialized a machine,because xpr station was not reset. From skoh at snf.stanford.edu Sun Aug 27 13:40:53 2006 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 27 Aug 2006 13:40:53 -0700 Subject: Problem svgcoat SNF 2006-08-27 13:40:53: wafers are not sent Message-ID: send indexer does not go down when start is pressed From pethe at snf.stanford.edu Sun Aug 27 23:20:11 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sun, 27 Aug 2006 23:20:11 -0700 Subject: Problem svgcoat SNF 2006-08-27 23:20:11: HMDS out Message-ID: From vilanova at snf.stanford.edu Mon Aug 28 07:53:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Aug 2006 07:53:44 -0700 Subject: Problem svgcoat SNF 2006-08-27 13:40:53: wafers are not sent Message-ID: refilled hmds , ok to use. From vilanova at snf.stanford.edu Mon Aug 28 07:54:37 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Aug 2006 07:54:37 -0700 Subject: Problem svgcoat SNF 2006-08-27 23:20:11: HMDS out Message-ID: refilled hmds , replaced empty resist bottle, purged line, removed full carboy, ok to use. From beinn at snf.stanford.edu Thu Aug 31 16:21:55 2006 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Thu, 31 Aug 2006 16:21:55 -0700 Subject: Problem svgcoat SNF 2006-08-31 16:21:55: ebr line dripping on wafer Message-ID: The ebr is dripping. Also, the 5mm ebr is more like 7-8 mm.