Problem svgcoat SNF 2006-08-07 21:26:22: spr220-7 won't dispense

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Aug 8 09:39:00 PDT 2006


thick resist working fine, Initialized controller settings , cycled
wafers ok to use, we will adjust the dispense flow for the thick
resist  around 11AM today 8/8/06 . 




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