Shutdown svgcoat SNF 2006-08-09 11:56:48: 7 um is down, sesor is dirty

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 9 14:41:06 PDT 2006


replaced TOP spindle solenoid valve, replaced leaky HMDS
canister, adjusted  program 4 and 6 Thick resist  dispense
cycled wafers , ok to use.   IF FOR SOME REASON THE 
ALARM GOES OFF WHILE DISPENSING THICK RESIST ,
JUST PRESS TEST ON THE CONTROLLER ( BOTTOM 
RIGHT HAND SIDE WINDOW) AND THAT WILL STOP THE 
ALARM I WILL FIX IT TOMORROW MORNING! :-) 




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