From kmla1 at snf.stanford.edu Mon Dec 4 10:34:27 2006 From: kmla1 at snf.stanford.edu (kmla1 at snf.stanford.edu) Date: Mon, 4 Dec 2006 10:34:27 -0800 Subject: Comment svgcoat SNF 2006-12-04 10:34:27: program #8 (1.6 um resist) Message-ID: edge bead removal is quite smaller than usual, about 1 mm From eata at snf.stanford.edu Wed Dec 6 18:33:53 2006 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Wed, 6 Dec 2006 18:33:53 -0800 Subject: Problem svgcoat SNF 2006-12-06 18:33:52: Track1 HMDS stop is earlier than it should be Message-ID: wafers stop at the front edge of the HMDS plate. From rohank at snf.stanford.edu Thu Dec 7 00:36:01 2006 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Thu, 7 Dec 2006 00:36:01 -0800 Subject: Shutdown svgcoat SNF 2006-12-07 00:36:01: SVGCOAT Prebake heater not working Message-ID: From vilanova at snf.stanford.edu Thu Dec 7 07:56:03 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 07:56:03 -0800 Subject: Comment svgcoat SNF 2006-12-04 10:34:27: program #8 (1.6 um resist) Message-ID: cleared Comment. From vilanova at snf.stanford.edu Thu Dec 7 07:58:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 07:58:44 -0800 Subject: Problem svgcoat SNF 2006-12-06 18:33:52: Track1 HMDS stop is earlier than it should be Message-ID: SOmeone Ran A Wafer Upside DOwn that's why the system wasnt working , hotplate was full of resist, Cleaned Hotplate and cycled wafers , ok to use, Please make sure you run your wafers the " right way". From vilanova at snf.stanford.edu Thu Dec 7 08:00:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 08:00:27 -0800 Subject: Shutdown svgcoat SNF 2006-12-07 00:36:01: SVGCOAT Prebake heater not working Message-ID: Someone Ran Wafer upside down , hotplate was full of resist , cleaned resist from hotplate , Lubricated Seal O ring , Cycled wafers , ok to use, Please make sure you are not running the wafers Upside down Specially the dummy wafers. From nvgirish at snf.stanford.edu Thu Dec 7 12:33:16 2006 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 7 Dec 2006 12:33:16 -0800 Subject: Problem svgcoat SNF 2006-12-07 12:33:16: Track not working! Message-ID: Wafer stuck in the HMDS track. From vilanova at snf.stanford.edu Thu Dec 7 12:58:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 12:58:44 -0800 Subject: Problem svgcoat SNF 2006-12-07 12:33:16: Track not working! Message-ID: there was a sensor waiting for a wafer at the end of the track , I cleared the sensor and pressed wafer lost , next wafer ( the one stuck on HMDS ) continued to next step , ok to use now. From bchui at snf.stanford.edu Sun Dec 10 17:54:00 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 10 Dec 2006 17:54:00 -0800 Subject: Problem svgcoat SNF 2006-12-10 17:53:59: track 1 HMDS alarm Message-ID: From jimkruger at snf.stanford.edu Sun Dec 10 18:00:53 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 10 Dec 2006 18:00:53 -0800 Subject: Problem svgcoat SNF 2006-12-10 18:00:53: Track 1 HMDS alarm intermittant Message-ID: HMDS low? From vilanova at snf.stanford.edu Mon Dec 11 08:13:50 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Dec 2006 08:13:50 -0800 Subject: Problem svgcoat SNF 2006-12-10 17:53:59: track 1 HMDS alarm Message-ID: Refilled canister. From vilanova at snf.stanford.edu Mon Dec 11 08:15:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Dec 2006 08:15:04 -0800 Subject: Problem svgcoat SNF 2006-12-10 18:00:53: Track 1 HMDS alarm intermittant Message-ID: Refilled HMDS , also the System was alarming because the Small Waste container was full o fliquid and nobody could empty it, ok to use. From dgunning at snf.stanford.edu Thu Dec 14 00:46:04 2006 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 14 Dec 2006 00:46:04 -0800 Subject: Comment svgcoat SNF 2006-12-14 00:46:03: hmds Message-ID: low hmds on track 1 - alarm switched off From kimsangb at snf.stanford.edu Thu Dec 14 20:11:54 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Thu, 14 Dec 2006 20:11:54 -0800 Subject: Problem svgcoat SNF 2006-12-14 20:11:53: coat pgm #8 edge removal too large Message-ID: much larger than 2mm.. From vilanova at snf.stanford.edu Fri Dec 15 11:19:41 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Dec 2006 11:19:41 -0800 Subject: Problem svgcoat SNF 2006-12-14 20:11:53: coat pgm #8 edge removal too large Message-ID: Pleaase Do not change or touch any of the ARM program!! I entered the right programs now everything fine, ok to use. From vilanova at snf.stanford.edu Fri Dec 15 11:19:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Dec 2006 11:19:56 -0800 Subject: Comment svgcoat SNF 2006-12-14 00:46:03: hmds Message-ID: read previous message.