Problem svgcoat SNF 2006-12-06 18:33:52: Track1 HMDS stop is earlier than it should be

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Dec 7 07:58:44 PST 2006


SOmeone Ran A Wafer Upside DOwn that's why the system
wasnt working  , hotplate was full of resist, Cleaned Hotplate
 and cycled wafers , ok to use, Please make sure you run your wafers the " right way".




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