Shutdown svgcoat SNF 2006-12-07 00:36:01: SVGCOAT Prebake heater not working

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Dec 7 08:00:27 PST 2006


Someone Ran Wafer upside down , hotplate was full of resist , cleaned resist from hotplate , Lubricated Seal O ring , Cycled
wafers , ok to use, Please make sure you are not running the
wafers Upside down Specially the dummy wafers. 




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